Optical scanning device and image forming apparatus including the same
US-9223131-B2 · Dec 29, 2015 · US
Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system
US8944598B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8944598-B2 |
| Application number | US-201314060888-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 23, 2013 |
| Priority date | Nov 13, 2012 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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- Title
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Abstract
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Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.
First claim
Opening claim text (preview).
What is claimed is: 1. An actuator, which is formed in a substrate including a handle layer, an elastic body layer, and an insulating layer sandwiched between the handle layer and the elastic body layer, the actuator comprising: a support portion; a movable portion supported to the support portion by an elastic body; a movable comb electrode formed on the movable portion; a fixed comb electrode supported by the support portion; and electrode wirings connected separately to…
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Electricity · mapped topic
Human Necessities · mapped topic
Human Necessities · mapped topic
Human Necessities · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8944598B2 cover?
- Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in whi…
- Who is the assignee on this patent?
- Canon Kk
- What technology area does this patent fall under?
- Primary CPC classification G02B26/0841. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).