Splashguard for high flow vacuum bubbler vessel

Patent metadata

Field	Value
Publication number	US-8944420-B2
Application number	US-201213350989-A
Country	US
Kind code	B2
Filing date	Jan 16, 2012
Priority date	Mar 19, 2009
Publication date	Feb 3, 2015
Grant date	Feb 3, 2015

Abstract

The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

First claim

The invention claimed is:

1. A container having a diptube inlet ending proximate a base of the container; at least one baffle disc, configured as a shallow downwardly open cone, positioned between the outlet of the diptube and an outlet of the container, configured to provide a narrow annular space between the baffle disc and an inner surface of a sidewall of the container; an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc; the baffle disc and deflector ledge capable of minimizing liquid droplets from entering the outlet to the container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.

2. The container of claim 1 wherein the deflector ledge has an innermost edge that is radially inward of an outermost edge of the at least one baffle disc.

3. The container of claim 2 wherein the deflector ledge has a shoulder below the innermost edge of the deflector ledge, which shoulder projects radially inward from the container inner surface sidewall, radially short of the innermost edge of the deflector ledge.

4. The container of claim 3 wherein the at least one baffle disc, deflector ledge and shoulder are in the upper portion of the container.

5. The container of claim 1 wherein the deflector ledge is spaced axially between an upper baffle disc and a lower baffle disc.

6. The container of claim 1 wherein the deflector ledge is spaced axially below two baffle discs.

7. The container of claim 1 wherein an inlet to the outlet of the container has an elbow configuration capable of minimizing liquid entering the outlet to the container.

8. The container of claim 1 wherein an inlet to the outlet of the container has a “Tee” configuration capable of minimizing liquid entering the outlet of the container.

9. The container of claim 1 wherein the container has a cylindrical shape.

10. A cylindrical vapor generation container having a diptube inlet capable of delivering a carrier gas into the container; a baffle disc having a circular and concave downward shape, positioned between an outlet end of the diptube inlet and an outlet of the container configured to provide a narrow annular space between an outermost circumferential perimeter edge of the baffle disc and an inner surface of a sidewall of the container; an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc, wherein the deflector ledge has an innermost edge that is radially inward of the outermost circumferential perimeter edge of the baffle disc; capable of minimizing liquid droplets from entering the outlet to the container when the carrier gas is bubbled through a liquid content of the container to dispense the liquid as a vapor from the container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.

11. A liquid dispense container having at least one baffle disc, configured as a shallow downwardly open cone, positioned between the inlet end of the diptube outlet and the inlet of the liquid dispense container, configured to provide a narrow annular space between the baffle disc and the inner surface of a sidewall of the container; an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc; wherein the deflector ledge has an innermost edge that is radially inward of an outermost edge of the baffle disc, capable of minimizing liquid droplets from entering the inlet to the liquid dispense container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.

Assignees

• Birtcher Charles Michael
• Steidl Thomas Andrew
• Air Prod & Chem

Inventors

• Birtcher Charles Michael
• Steidl Thomas Andrew

Classifications

• F17C3/00 Primary

  Vessels not under pressure · CPC title

• B01F3/04 Primary

  Operations & Transport · mapped topic

• F17C2201/056

  Small (<1 m3) · CPC title

• F17C2209/234

  of closing end pieces, e.g. caps · CPC title

• F17C2225/0123

  gaseous, e.g. CNG, GNC · CPC title