Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
Yaw-rate sensor
US8943891B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8943891-B2 |
| Application number | US-201213365740-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 3, 2012 |
| Priority date | Mar 30, 2011 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
First claim
Opening claim text (preview).
What is claimed is: 1. A yaw-rate sensor, comprising: a first Coriolis element; a second Coriolis element; a substrate having a main plane of extension; a first drive element to drive the first Coriolis element in parallel to a second axis; a second drive element to drive the second Coriolis element in parallel to the second axis, the first drive element and the second drive element being mechanically coupled to each other via a drive coupling element; and a detection el…
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- G01C19/5747Primary
Physics · mapped topic
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- What does patent US8943891B2 cover?
- A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the s…
- Who is the assignee on this patent?
- Ohms Torsten, Kuhlmann Burkhard, Sattler Robert, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5747. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).