Sensor and electronic device
US-2024310404-A1 · Sep 19, 2024 · US
US8943890B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8943890-B2 |
| Application number | US-201213563557-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 31, 2012 |
| Priority date | Aug 12, 2008 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
Opening claim text (preview).
What is claimed is: 1. An inertial sensor comprising: a basement layer having a main surface; a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction; a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second directio…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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