Mems flow control chip for gas chromatography
US-2015369781-A1 · Dec 24, 2015 · US
US8943887B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8943887-B2 |
| Application number | US-201013512762-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 16, 2010 |
| Priority date | Dec 18, 2009 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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One aspect of the invention provides a flow sensing apparatus including: a fluid channel that allows a fluid to flow in a first direction; a first thermoelectric sensing element arranged at a first position along the fluid channel such that it senses a temperature of the fluid; a second thermoelectric sensing element arranged at a second position along the fluid channel and separated from the first sensing element by a predetermined distance along the fluid channel; and a heating element arranged between the first and second thermoelectric sensing elements, the heating element being equally spaced from the first and second thermoelectric sensing elements.
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What is claimed is: 1. A flow sensing apparatus comprising: a fluid channel that allows a fluid to flow in a first direction; a first thermoelectric sensing element arranged at a first position along the fluid channel such that the first thermoelectric sensing element senses a temperature of the fluid, wherein the first thermoelectric sensing element is doped with a N-type charge carrier; a second thermoelectric sensing element arranged at a second position along the fluid cha…
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