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Varying optical coefficients to generate spectra for polishing control

US8942842B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8942842-B2
Application numberUS-201113096714-A
CountryUS
Kind codeB2
Filing dateApr 28, 2011
Priority dateApr 28, 2011
Publication dateJan 27, 2015
Grant dateJan 27, 2015

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  1. Title

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  2. Abstract

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  4. Key dates

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  5. First independent claim

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A method of generating a library of reference spectra includes storing an optical model for a layer stack having at a plurality of layers, receiving user input identifying a set of one or more refractive index functions and a set of one or more extinction coefficient functions a first layer from the plurality of layers, wherein the set of one or more refractive index functions includes a plurality of different refractive index functions or the set of one or more extinction coefficient functions includes a plurality of different extinction coefficient functions, and for each combination of a refractive index function from the set of refractive index functions and an extinction coefficient function from the set of extinction coefficient functions, calculating a reference spectrum using the optical model based on the refractive index function, the extinction coefficient function and a first thickness of the first layer.

First claim

Opening claim text (preview).

What is claimed is: 1. A method of generating a library of reference spectra, comprising: storing an optical model for a layer stack having a plurality of layers, wherein the layer stack comprises a stack of P+1 layers, and wherein the stack includes a first layer, and with layer 0 being a bottom layer and layer P being an outermost layer; receiving user input identifying a set of one or more refractive index functions and a set of one or more extinction coefficient functions…

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Frequently asked questions

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What does patent US8942842B2 cover?
A method of generating a library of reference spectra includes storing an optical model for a layer stack having at a plurality of layers, receiving user input identifying a set of one or more refractive index functions and a set of one or more extinction coefficient functions a first layer from the plurality of layers, wherein the set of one or more refractive index functions includes a plural…
Who is the assignee on this patent?
David Jeffrey Drue, Benvegnu Dominic J, Hu Xiaoyuan, and 1 more
What technology area does this patent fall under?
Primary CPC classification B24B37/013. Mapped technology areas include Operations & Transport.
When was this patent published?
Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).