Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
Integrated acoustic transducer obtained using MEMS technology, and corresponding manufacturing process
US8942394B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8942394-B2 |
| Application number | US-64460209-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2009 |
| Priority date | Dec 23, 2008 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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Abstract
Official abstract text for this publication.
A MEMS acoustic transducer provided with a substrate having cavity, and a membrane suspended above the cavity and fixed peripherally to the substrate, with the possibility of oscillation, through at least one membrane anchorage. The membrane comprises at least one spring arranged in the proximity of the anchorage and facing it, and is designed to act in tension or compression in a direction lying in the same plane as said membrane.
First claim
Opening claim text (preview).
The invention claimed is: 1. A MEMS acoustic transducer, comprising: a substrate having a cavity; membrane anchors; and a suspended membrane coupled to the substrate by the membrane anchors, the suspended membrane located above said cavity and entirely suspended between the membrane anchors, said suspended membrane being configured to oscillate and including a first through-hole that is entirely surrounded on all sides by the suspended membrane and arranged near a first one of…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H04R19/005Primary
Electricity · mapped topic
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- What does patent US8942394B2 cover?
- A MEMS acoustic transducer provided with a substrate having cavity, and a membrane suspended above the cavity and fixed peripherally to the substrate, with the possibility of oscillation, through at least one membrane anchorage. The membrane comprises at least one spring arranged in the proximity of the anchorage and facing it, and is designed to act in tension or compression in a direction lyi…
- Who is the assignee on this patent?
- Conti Sebastiano, Perletti Matteo, St Microelectronics Srl
- What technology area does this patent fall under?
- Primary CPC classification H04R19/005. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).