Electronic device with stacked metasurface lenses
US-12153233-B1 · Nov 26, 2024 · US
US8941920B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8941920-B2 |
| Application number | US-200913055663-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 7, 2009 |
| Priority date | Jul 28, 2008 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.
Opening claim text (preview).
The invention claimed is: 1. A method of producing an optical element comprising a first structural body and a second structural body on a base, the method comprising the steps of: forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged; forming an etching stopper layer on an upper part of the structural part; covering the structural part and the etching stopper layer with a covering material; polishing the covering…
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