Defect detection using thermal laser stimulation and atomic force microscopy
US-2024069095-A1 · Feb 29, 2024 · US
US8941402B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8941402-B2 |
| Application number | US-201013382503-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 18, 2010 |
| Priority date | Jul 10, 2009 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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An electromagnetic field measuring apparatus capable of measuring an electromagnetic field for a minuscule area in which electronic devices are densely packed with a high sensitivity is provided. In an electromagnetic field measuring apparatus according to the present invention, the amplitude level of signal light (pf) is adjusted by the analyzer ( 34 ) by adjusting its angle with respect to the plane of polarization of the signal light (pf) based on an amplitude level control signal (eb) supplied from the calculation control unit ( 40 ). An amplitude level control signal (eb) is supplied from the calculation control unit ( 40 ) to the analyzer ( 34 ) based on the spectrum (ea) of an electric signal (ed) measured by an RF spectrum analyzer ( 39 ). The amplitude level ration between the carrier and the sideband contained in the signal light (ph) incident on the optical receiver ( 38 ) is controlled to a fixed value.
Opening claim text (preview).
The invention claimed is: 1. An electromagnetic field measuring apparatus comprising: a laser light source that emits a laser beam having a predetermined frequency as a carrier signal light; a light modulator that generates a modulated light by modulating the carrier signal light at a predetermined local oscillation frequency, and emitting the modulated light; a certain optical component; an electromagnetic field sensor that generates a signal light by exposing the modulated…
Physics · mapped topic
Physics · mapped topic
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