Piezoelectric actuator, piezoelectric drive device, robot, electronic component transport apparatus, and printer
US-2019103550-A1 · Apr 4, 2019 · US
US8941290B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8941290-B2 |
| Application number | US-84164410-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 22, 2010 |
| Priority date | Jul 28, 2009 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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Provided are a vibrating body and a vibration wave actuator, which can suppress vibration attenuation along with a reduction in size with an inexpensive structure, to thereby improve vibration efficiency, and can output stable vibration energy. A vibrating body includes: a piezoelectric element including a piezoelectric layer and an electrode layer; a ceramic substrate to which the piezoelectric element is fixed; and a ceramic layer including the same main component as a main component of the ceramic substrate, which is provided between the piezoelectric element and the ceramic substrate, and the piezoelectric element is fixed to the ceramic substrate through intermediation of the ceramic layer.
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What is claimed is: 1. A vibrating body, comprising: a piezoelectric element comprising a first piezoelectric layer and an electrode layer; a ceramic substrate; and a ceramic layer comprising as a main component the same main component of the ceramic substrate, wherein the piezoelectric element is fixed to the ceramic substrate with the ceramic layer interposed between the piezoelectric element and the ceramic substrate, wherein the ceramic layer comprises glass, wherein…
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