Methods and structures for using diamond in the production of MEMS

Patent metadata

Field	Value
Publication number	US-8940639-B2
Application number	US-201213718859-A
Country	US
Kind code	B2
Filing date	Dec 18, 2012
Priority date	Dec 18, 2012
Publication date	Jan 27, 2015
Grant date	Jan 27, 2015

Abstract

A MEMS device with movable MEMS structure and electrodes is produced by fabricating electrodes and shielding the electrodes with diamond buttons during subsequent fabrication steps, such as the etching of sacrificial oxide using vapor HF. In some embodiments, the diamond buttons are removed after the movable MEMS structure is released.

First claim

What is claimed is:

1. A method of forming a micro-electromechanical systems (MEMS) device, comprising:
providing a substrate having a first side and a second side;
forming an electrode on or above the first side of the substrate;
providing a diamond layer on the electrode;
forming a sacrificial layer on or above the first side of the substrate;
forming a MEMS structure on the sacrificial layer such that the sacrificial layer is between the MEMS structure and the substrate…

Assignees

• Analog Devices Inc

Inventors

• Liu Fang
• Yang Kuang L

Classifications

• B81C1/00158 Primary

  Operations & Transport · mapped topic

• B81B2201/0242

  Operations & Transport · mapped topic

• B81C1/00801 Primary

  Operations & Transport · mapped topic

• H04R19/005

  Electricity · mapped topic

• B81B2203/0118

  Operations & Transport · mapped topic