Method of making a multicomponent film
US-9214630-B2 · Dec 15, 2015 · US
Coating device and coating method
US8940367B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8940367-B2 |
| Application number | US-201013375938-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 13, 2010 |
| Priority date | Jun 2, 2009 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
First claim
Opening claim text (preview).
The invention claimed is: 1. A coating device, comprising at least one evacuable recipient which is adapted to receive a substrate, at least one gas supply device, by means of which at least one gaseous precursor can be introduced into the recipient, and at least one activation device which comprises at least one heatable activation element, the end of which is fastened to a holding element at a fastening point, a shielding element being present, by means of which at least the fast…
Assignees
Inventors
Classifications
- C23C16/22Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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Frequently asked questions
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- What does patent US8940367B2 cover?
- A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shiel…
- Who is the assignee on this patent?
- Harig Tino, Höfer Markus, Laukart Artur, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification C23C16/22. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).