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Process for producing polycrystalline silicon
US8940264B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8940264-B2 |
| Application number | US-201113219805-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2011 |
| Priority date | Sep 6, 2010 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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Abstract
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The invention provides a process for producing polycrystalline silicon, by introducing reaction gases containing a silicon-containing component and hydrogen into reactors to deposit silicon, wherein a purified condensate from a first deposition process in a first reactor is supplied to a second reactor, and is used in a second deposition process in that second reactor.
First claim
Opening claim text (preview).
What is claimed is: 1. A process for producing polycrystalline silicon, by introducing reaction gases comprising a silicon-containing component and hydrogen into reactors to deposit silicon, wherein: a) a purified condensate from a first deposition process in a first reactor is supplied to a second reactor, and is used in a second deposition process in the second reactor and b) the first and second reactors each include a separate hydrogen circuit and hydrogen not consumed in th…
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Electricity · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
- C01B33/02Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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Frequently asked questions
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- What does patent US8940264B2 cover?
- The invention provides a process for producing polycrystalline silicon, by introducing reaction gases containing a silicon-containing component and hydrogen into reactors to deposit silicon, wherein a purified condensate from a first deposition process in a first reactor is supplied to a second reactor, and is used in a second deposition process in that second reactor.
- Who is the assignee on this patent?
- Haeckl Walter, Hesse Karl, Hoebold Wilhelm, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification C01B33/02. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).