Adsorption bar, vacuum aligner system, and control method of vacuum aligner system
US-2018247750-A1 · Aug 30, 2018 · US
US8939431B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8939431-B2 |
| Application number | US-200913142642-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 12, 2009 |
| Priority date | Dec 30, 2008 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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An electromagnetic positioning device has a long stretched out anchor plunger section as well as an anchor having an anchor body section axially continuing the latter, which in order to magnetically interact with a core unit and by energizing a stationary provided coil device is movably designed relative to the latter. The core unit is designed in such a way that it at least sectionally encompasses the anchor plunger section as well as the anchor body section with an expanded diameter relative to the anchor plunger section. The core unit is a multi-part design in the axial direction with a stationary core section, an axially movable core section and a variable core gap between the stationary and movable core section, and the movable core section and anchor are designed and joined together via a driver in such a way that, in response to energization, the movable core section moves, causing the core gap to close, and the driver drives the anchor in the axial direction.
Opening claim text (preview).
The invention claimed is: 1. An electromagnetic positioning device comprising: an anchor having a long stretched out anchor plunger section and an anchor body section axially continuing the anchor plunger section; said anchor plunger section configured to magnetically interact with a core unit by energizing a stationary provided coil device and said anchor plunger section being movably designed relative to the core unit; the core unit being designed in such a way that said core unit at least sectionally encompasses the anchor plunger section and the anchor body section with an expanded diameter relative to the anchor plunger section; the core unit being a multi-part design in an axial direction with a stationary core section, an axially movable core section, and a variable core gap between the stationary and movable core section, the stationary core section and the movable core section both configured to magnetically interact with the anchor; and the movable core section and anchor being designed and joined together via driver means in such a way that, in response to energization, the movable core section moves, causing the core gap to close, and the driver means drive the anchor in the axial direction a yoke that interacts with the anchor body section, said yoke having a movable yoke plate and said yoke being designed in such a way that the yoke mechanically supports the driving of the anchor in response to energization. 2. A device according to claim 1 , wherein the driver means are provided on the anchor plunger section. 3. A device according to claim 1 , wherein the driver means exhibit an annular shoulder provided on the anchor. 4. A device according to claim 3 , wherein the annular shoulder has a multi-stage design. 5. A device according to claim 1 , wherein the driver means has a conical section in the form of an annular cone on the anchor. 6. A device according to claim 1 , wherein the movable core section has a cup-shaped design, and is provided with an axial opening for guiding through the plunger section. 7. A device according to claim 6 , wherein an outer jacket area of the movable core section has an annular conical shape. 8. A device according to claim 1 , wherein the driver means on the movable core section are formed in an opening region provided for guiding through the anchor plunger section. 9. A device according to claim 8 , wherein the driver means on the movable core section are configured like one of an annular shoulder and an annular cone.
characterised by pulling-force characteristics · CPC title
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