Photovoltaic devices including nitrogen-containing metal contact
US-2015380601-A1 · Dec 31, 2015 · US
US8937243B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8937243-B2 |
| Application number | US-61538309-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 10, 2009 |
| Priority date | Oct 9, 2006 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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The present disclosure enables high-volume cost effective production of three-dimensional thin film solar cell (3-D TFSC) substrates. First, the present disclosure discloses pyramid-like unit cell structure 16 and 50 which enable epitaxial growth through their open pyramidal structure. The present disclosure than gives four 3-D TFSC embodiments 70, 82, 100 , and 110 which may combined as necessary. A basic 3-D TFSC having a substrate, emitter, oxidation on the emitter, front and back metal contacts allows simple processing. Other embodiments disclose a selective emitter, selective backside metal contact, and front-side SiN ARC layers. Several processing methods including process flows 150, 200, 250, 300 , and 350 enable production of these 3-D TFSC. Further, the present disclosure enables higher throughput through the use of dual sided template 400 . By processing the substrate in the template, the present disclosure increases yield and reduces processing steps.
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What is claimed is: 1. A pyramidal three-dimensional thin film solar cell (3-D TFSC) having enhanced processing properties, comprising: a p-type epitaxial 3-D TFSC substrate comprising a plurality of pyramidal unit cells, wherein said unit cells comprise: tapered sidewalls having different crystallographic planes including the <111> plane, said tapered sidewalls forming an open pyramid-like structure; a substantially flat top-ridge having a crystallographic <100> plane, said to…
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