Light-emitting device
US-12155019-B2 · Nov 26, 2024 · US
Method of fabricating substrate where patterns are formed
US8936828B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8936828-B2 |
| Application number | US-200913265366-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 29, 2009 |
| Priority date | Apr 29, 2009 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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Abstract
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Provided is a method of fabricating a substrate where patterns are formed, the method including: preparing a solution in which a plurality of oxide beads are dispersed; forming patterns on a substrate; installing a provisional structure in an upper portion of the substrate so that a micro-channel is formed on the substrate; injecting the solution in which the oxide beads are dispersed, into the micro-channel and fixing the oxide beads at the substrate; and thermally processing the substrate. A plurality of low-priced oxide beads can be patterned on a substrate to have a desired shape so that damages can be prevented from occurring in the substrate during dry etching, and an etching process is not performed so that a yield of a device is not reduced and mass production of the device increases.
First claim
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The invention claimed is: 1. A method of fabricating a substrate where patterns are formed, the method comprising: preparing a solution in which a plurality of oxide beads are dispersed; forming patterns on a substrate; installing a provisional structure in an upper portion of the substrate so that a micro-channel is formed on the substrate; injecting the solution in which the oxide beads are dispersed, into the micro-channel and fixing the oxide beads at the substrate; and…
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Frequently asked questions
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- What does patent US8936828B2 cover?
- Provided is a method of fabricating a substrate where patterns are formed, the method including: preparing a solution in which a plurality of oxide beads are dispersed; forming patterns on a substrate; installing a provisional structure in an upper portion of the substrate so that a micro-channel is formed on the substrate; injecting the solution in which the oxide beads are dispersed, into the…
- Who is the assignee on this patent?
- Yoon Euijoon, Kwon Sung-Hoon, Snu R&Db Foundation
- What technology area does this patent fall under?
- Primary CPC classification H10H20/82. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).