Substrate processing apparatus, substrate processing system, and maintenance method
US-2024339306-A1 · Oct 10, 2024 · US
Robotic device for substrate transfer applications
US8936293B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8936293-B2 |
| Application number | US-201113333688-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 21, 2011 |
| Priority date | Dec 21, 2011 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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Abstract
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A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.
First claim
Opening claim text (preview).
The invention claimed is: 1. A device, comprising: a robotic arm that includes an end effector, the end effector including: (i) an electrical or magnetic unit that has on and off modes, wherein the unit, when in the on mode, provides an electrical or magnetic attractive holding force between the unit and a substrate carrier that houses a substrate, so that the position of the substrate carrier remains fixed relative to the unit; and (ii) a pushing member that is…
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Electricity · mapped topic
- H10P72/3302Primary
Electricity · mapped topic
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- What does patent US8936293B2 cover?
- A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier…
- Who is the assignee on this patent?
- Lada Christopher O, Parkin Stuart Stephen Papworth, Samant Mahesh Govind, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3302. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).