Neural network computation circuit, control circuit therefor, and control method therefor
US-2024411520-A1 · Dec 12, 2024 · US
US8934294B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8934294-B2 |
| Application number | US-201414183161-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 18, 2014 |
| Priority date | Jul 13, 2011 |
| Publication date | Jan 13, 2015 |
| Grant date | Jan 13, 2015 |
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A semiconductor integrated circuit device, a method of manufacturing the same, and a method of driving the same are provided. The device includes a semiconductor substrate, an upper electrode extending from a surface of the semiconductor substrate; a plurality of switching structures extending from both sidewalls of the upper electrode in a direction parallel to the surface of the semiconductor substrate, and a phase-change material layer disposed between the plurality of switching structures and the upper electrode.
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What is claimed is: 1. A method of manufacturing a semiconductor integrated circuit device, comprising: forming a multi-layered insulating structure on a semiconductor substrate; forming a vertical hole in a predetermined portion of the multi-layered insulating structure; forming a plurality of horizontal holes in the insulating structure at both sides of the vertical hole and extending in a direction parallel to the semiconductor substrate; forming a switching structure in…
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