Radiation source
US-9500953-B2 · Nov 22, 2016 · US
Bundle-guiding optical collector for collecting the emission of a radiation source
US8934085B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8934085-B2 |
| Application number | US-72608110-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 17, 2010 |
| Priority date | Sep 21, 2007 |
| Publication date | Jan 13, 2015 |
| Grant date | Jan 13, 2015 |
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Abstract
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A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.
First claim
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What is claimed is: 1. An optical system having an illumination field, the optical system comprising: a bundle-guiding optical collector configured to collect radiation emitted by a radiation source and to form a transformed radiation bundle from a collected source-side radiation bundle, the bundle-guiding optical collector comprising a reflective surface which is a first bundle-forming surface downstream of the radiation source; and a bundle-guiding optical element upstream of…
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Physics · mapped topic
- G03F7/70175Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8934085B2 cover?
- A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images include…
- Who is the assignee on this patent?
- Dinger Udo, Weth Christopher, Zeiss Carl Smt Gmbh
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70175. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jan 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).