Thermal via for 3D integrated circuits structures

US8933540B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8933540-B2
Application numberUS-201313780033-A
CountryUS
Kind codeB2
Filing dateFeb 28, 2013
Priority dateFeb 28, 2013
Publication dateJan 13, 2015
Grant dateJan 13, 2015

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Abstract

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A three dimensional integrated circuit (3D-IC) structure, method of manufacturing the same and design structure thereof are provided. The 3D-IC structure includes two chips having a dielectric layer, through substrate vias (TSVs) and pads formed on the dielectric layer. The dielectric layer is formed on a bottom surface of each chip. Pads are electrically connected to the corresponding TSVs. The chips are disposed vertically adjacent to each other. The bottom surface of a second chip faces the bottom surface of a first chip. The pads of the first chip are electrically connected to the pads of the second chip through a plurality of conductive bumps. The 3D-IC structure further includes a thermal via structure vertically disposed between the first chip and the second chip and laterally disposed between the corresponding conductive bumps. The thermal via structure has an upper portion and a lower portion.

First claim

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What is claimed is: 1. A three dimensional (3D) integrated circuit structure comprising: a first chip having a first dielectric layer, a first plurality of through substrate vias (TSVs) and a first plurality of pads on the first dielectric layer, the first dielectric layer formed on a bottom surface of the first chip, the pads are electrically connected to the corresponding TSVs of the first chip; a second chip having a second dielectric layer, a second plurality of TSVs, and a…

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What does patent US8933540B2 cover?
A three dimensional integrated circuit (3D-IC) structure, method of manufacturing the same and design structure thereof are provided. The 3D-IC structure includes two chips having a dielectric layer, through substrate vias (TSVs) and pads formed on the dielectric layer. The dielectric layer is formed on a bottom surface of each chip. Pads are electrically connected to the corresponding TSVs. Th…
Who is the assignee on this patent?
IBM
What technology area does this patent fall under?
Primary CPC classification H10W90/00. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jan 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).