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Charged particle beam device
US8933422B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8933422-B2 |
| Application number | US-201113812842-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 8, 2011 |
| Priority date | Jul 28, 2010 |
| Publication date | Jan 13, 2015 |
| Grant date | Jan 13, 2015 |
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Abstract
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The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.
First claim
Opening claim text (preview).
The invention claimed is: 1. A charged particle beam device comprising: a charged particle source; a specimen stage that maintains a specimen on which a charged particle beam emitted from the charged particle source is irradiated; a specimen chamber that sets an atmosphere in which the specimen exists as a vacuum state; and an exchange chamber that evacuates a specimen atmosphere to be introduced to the specimen chamber, the charged particle beam device further comprising…
Assignees
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Classifications
Electricity · mapped topic
- H01J37/18Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8933422B2 cover?
- The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen s…
- Who is the assignee on this patent?
- Ishii Ryoichi, Doi Takashi, Sato Osamu, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/18. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).