Multi-technique imaging system using vertical motion of stage to switch imaging techniques

Patent metadata

Field	Value
Publication number	US-8933384-B2
Application number	US-201213430316-A
Country	US
Kind code	B2
Filing date	Mar 26, 2012
Priority date	Mar 25, 2011
Publication date	Jan 13, 2015
Grant date	Jan 13, 2015

Abstract

A system for and method of performing multi-technique imaging. Such multi-technique imaging system includes a surface for supporting a specimen and at least two illumination sources for producing light radiation. The system also includes a plurality of reflective and refractive devices arranged to direct at least part of the light radiation from each of the at least two illumination sources to the surface such that at least part of the light radiation from each of the at least two illumination sources illuminates substantially the same area on the surface. The system also includes a sensor configured to receive light radiation from the at least two illumination sources reflected by the specimen and/or that pass by the specimen. The system also includes a power source configured to power the at least two illumination sources and the sensor.

First claim

That which is claimed is:

1. A selective system for bright field imaging technique and diffraction imaging measurement technique, comprising:
a surface for supporting a specimen, the surface configured to be moved laterally and vertically;
a first illumination source for the bright field imaging technique and a second illumination source for the diffraction measurement imaging technique;
a plurality of reflective and refractive devices arranged to direct and focus at least par…

Assignees

• Savran Cagri A
• Arif Khalid M
• Purdue Research Foundation

Inventors

• Savran Cagri A
• Arif Khalid M

Classifications

• G01N21/553

  Physics · mapped topic

• G01N21/55 Primary

  Physics · mapped topic

• G01N21/65

  Physics · mapped topic

• G02B21/36

  Physics · mapped topic

• G01N2201/0221

  Physics · mapped topic