Method for making an array of micro-needles
US-2015374966-A1 · Dec 31, 2015 · US
US8932473B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8932473-B2 |
| Application number | US-81167408-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2008 |
| Priority date | Jan 6, 2008 |
| Publication date | Jan 13, 2015 |
| Grant date | Jan 13, 2015 |
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The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
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The invention claimed is: 1. A method for making a 3D nanostructure having a nanosubstructure in the form of a 3D oriented horizontal or horizontal and vertical nanowire, comprising the steps of: i) providing a mold comprising at least one horizontal or one horizontal and vertical sharp concave corner; ii) conformal depositing at least one structural material in at least the sharp concave corner; iii) isotropically removing a portion of structural material deposited in step ii…
Physics · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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