Using surfaces with printed patterns for image and data processing
US-9213917-B2 · Dec 15, 2015 · US
US8929665B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8929665-B2 |
| Application number | US-201013375131-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 21, 2010 |
| Priority date | May 29, 2009 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant device, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.
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The invention claimed is: 1. A template-matching template creation method in which a desired location is identified by comparing a template stored in advance and an image acquired by a microscope, said template-matching template creation method comprising steps of: accumulating a plurality of image data of a plurality of patterns formed under a same fabrication condition and at different fabrication timings, the plurality of image data having been acquired by said microscope, and…
Physics · mapped topic
Physics · mapped topic
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Physics · mapped topic
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