Method of manufacturing a template matching template, as well as a device for manufacturing a template

US8929665B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8929665-B2
Application numberUS-201013375131-A
CountryUS
Kind codeB2
Filing dateMay 21, 2010
Priority dateMay 29, 2009
Publication dateJan 6, 2015
Grant dateJan 6, 2015

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Abstract

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Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant device, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.

First claim

Opening claim text (preview).

The invention claimed is: 1. A template-matching template creation method in which a desired location is identified by comparing a template stored in advance and an image acquired by a microscope, said template-matching template creation method comprising steps of: accumulating a plurality of image data of a plurality of patterns formed under a same fabrication condition and at different fabrication timings, the plurality of image data having been acquired by said microscope, and…

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What does patent US8929665B2 cover?
Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant device, is proposed by both of which a templat…
Who is the assignee on this patent?
Yamada Yukari, Yang Kyoungmo, Kakuta Junichi, and 1 more
What technology area does this patent fall under?
Primary CPC classification G06T7/0044. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Jan 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).