3D non-volatile memory device, memory system including the same, and method of manufacturing the same

US8928144B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8928144-B2
Application numberUS-201213599956-A
CountryUS
Kind codeB2
Filing dateAug 30, 2012
Priority dateDec 20, 2011
Publication dateJan 6, 2015
Grant dateJan 6, 2015

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Abstract

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A three-dimensional 3D nonvolatile memory device includes vertical channel layers protruding from a substrate; interlayer insulating layers and conductive layer patterns alternately deposited along the vertical channel layers; a barrier metal pattern surrounding each of the conductive layer patterns; a charge blocking layer interposed between the vertical channel layers and the barrier metal patterns; and a diffusion barrier layer interposed between the barrier metal patterns and the charge blocking layer.

First claim

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What is claimed is: 1. A 3-Dimensional (3D) non-volatile memory device comprising: vertical channel layers protruding from a substrate; interlayer insulating layers and conductive layer patterns alternately deposited along the vertical channel layers; barrier metal patterns surrounding the conductive layer patterns, respectively, wherein the barrier metal patterns include first impurities; a charge blocking layer interposed between the vertical channel layers and the barrier…

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What does patent US8928144B2 cover?
A three-dimensional 3D nonvolatile memory device includes vertical channel layers protruding from a substrate; interlayer insulating layers and conductive layer patterns alternately deposited along the vertical channel layers; a barrier metal pattern surrounding each of the conductive layer patterns; a charge blocking layer interposed between the vertical channel layers and the barrier metal pa…
Who is the assignee on this patent?
Kim Suk Goo, Sk Hynix Inc
What technology area does this patent fall under?
Primary CPC classification H10D30/0413. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jan 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).