JLT (junction-less transistor) device and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-8928082-B2
Application number	US-201313921209-A
Country	US
Kind code	B2
Filing date	Jun 19, 2013
Priority date	Feb 26, 2013
Publication date	Jan 6, 2015
Grant date	Jan 6, 2015

Abstract

A method for fabricating a junction-less transistor device that includes a substrate, a buried dielectric layer having a fin structure on the substrate, a doped region formed through the buried dielectric layer in the substrate, a semiconductor layer overlying the buried dielectric layer and the doped region, a gate structure on the semiconductor layer, and source/drain regions in the semiconductor layer at opposite sides of the gate structure. The semiconductor layer includes first, second, third regions, with the second region interposed between the first and second regions and disposed underneath the gate electrode structure. The first, second, and third regions have a same doping polarity. The second region has a doping concentration less than those of the first and second regions. The second region and the doped region have opposite doping polarities. The second region has a groove in contact with a bottom portion of the gate structure.

First claim

What is claimed is:

1. A junction less-transistor comprising:
a substrate;
a buried dielectric layer having a fin structure on the substrate;
a doped region formed through the buried dielectric layer and in the substrate;
a semiconductor material layer overlying the buried dielectric layer and the doped region;
a gate structure wrapping around a portion of the semiconductor material layer; and
source/drain structures formed in the semiconductor material layer at opposite…

Assignees

• Semiconductor Mfg Int Shanghai

Inventors

• Liu Jinhua

Classifications

• H10D64/519 Primary

  Electricity · mapped topic

• H10D30/021

  Electricity · mapped topic

• H10D30/60 Primary

  Electricity · mapped topic

• H01L29/66477

  Electricity · mapped topic

• H01L29/78 Primary

  Electricity · mapped topic