Semiconductor structure with reduced leakage current and method for manufacturing the same
US-2024413223-A1 · Dec 12, 2024 · US
US8928047B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8928047-B2 |
| Application number | US-201113288170-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2011 |
| Priority date | Nov 3, 2010 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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An integrated circuit contains a transistor with a stress enhancement region on the source side only. In a DeMOS transistor, forming the stress enhancement region on the source side only and not forming a stress enhancement region in the drain extension increases the resistance of the drain extension region enabling formation of a DeMOS transistor with reduced area. In a MOS transistor, by forming the stress enhancement region on the source side only and eliminating the stress enhancement region from the drain side, transistor leakage is reduced and CHC reliability improved.
Opening claim text (preview).
What is claimed is: 1. An integrated circuit having a drain extended metal oxide semiconductor (DeMOS) transistor, comprising: a semiconductor substrate; a gate over said semiconductor substrate; a channel in said semiconductor substrate beneath said gate; a source in said semiconductor substrate adjacent said channel, said source comprising a stress enhancement region comprising an implanted stress enhancing species which is not a dopant species; and a drain comprising a…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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