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Substrate structure, method of forming the substrate structure and chip comprising the substrate structure
US8928006B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8928006-B2 |
| Application number | US-201213988724-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 21, 2012 |
| Priority date | Feb 28, 2011 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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- Title
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Abstract
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A groove structure formed on a surface of a substrate. The groove structure includes a lateral epitaxial pattern in a cross section perpendicular to the surface, which has: a first edge inclined to the surface; a second edge adjacent to first edge and parallel to the surface; a third edge parallel to the first edge, having a projection on the surface covering the second edge; and a fourth edge adjacent to the third edge. A first intersection between the second edge and the third edge on the second edge and an injection of a second intersection between the third edge and the fourth edge on the second edge are located on two sides of a third intersection between the first edge and the second edge, or the injection of the second intersection between the third edge and the fourth edge on the second edge coincides with the third intersection.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate structure, comprising: a substrate; and at least a groove structure formed on a surface of the substrate, the groove structure having a lateral epitaxial pattern in a cross section perpendicular to the surface of the substrate, wherein the lateral epitaxial pattern comprises: a first edge inclined with respect to the surface of the substrate; a second edge adjacent to the first edge and parallel to the surface of the substrate; a third…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8928006B2 cover?
- A groove structure formed on a surface of a substrate. The groove structure includes a lateral epitaxial pattern in a cross section perpendicular to the surface, which has: a first edge inclined to the surface; a second edge adjacent to first edge and parallel to the surface; a third edge parallel to the first edge, having a projection on the surface covering the second edge; and a fourth edge …
- Who is the assignee on this patent?
- Xie Chunlin, Su Xilin, Hu Hongpo, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification H10H20/819. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).