Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
US-10684009-B2 · Jun 16, 2020 · US
US8926319B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8926319-B2 |
| Application number | US-201113069133-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 22, 2011 |
| Priority date | Sep 22, 2008 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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A device for burning a fuel/oxidant mixture in a strongly exothermic reaction, consists of a reactor with a combustion chamber containing at least one first porous material and at least one second porous material in separate zones A and C. The zones are designed in such a way that an exothermic reaction can only occur in zone B, and with one or more feed lines for the fuel and for the oxidant, whereby zone A, which consists of the first porous material, is separated by a distance of approximately 10 mm to 4000 mm, for example approximately 20 mm to 500 mm, equating to one zone B, from zone C which consists of the second porous material and is located before zone C in a flow direction of the fuel/oxidant mixture.
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What is claimed is: 1. A device for burning a fuel and oxidant mixture in a strongly exothermic reaction, the device comprising: a reactor including at least one feed line for the fuel and the oxidant and a combustion chamber including at least one first porous material in a first zone and at least one second porous material in a separate second zone, said combustion chamber, said at least one first porous material and said at least one second porous material being formed from mat…
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