Method of calibrating surface texture measurement device

Patent metadata

Field	Value
Publication number	US-8925367-B2
Application number	US-201213419748-A
Country	US
Kind code	B2
Filing date	Mar 14, 2012
Priority date	Mar 18, 2011
Publication date	Jan 6, 2015
Grant date	Jan 6, 2015

Abstract

A method of calibrating a surface texture measurement device includes obtaining Y-axis shape measurement data and a maximum diameter portion to obtain upper and lower maximum diameter portions of a reference sphere from Y-axis upper and lower shape data obtained by relatively moving in the Y-axis direction while a downward and an upward styluses are in contact with an upper and a lower surfaces, respectively, of the reference sphere; obtaining X-axis shape measurement data to obtain X-axis upper and lower shape data of the reference sphere by relatively moving in the X-axis direction while the downward stylus is in contact with the upper diameter portion and the upward stylus with the lower diameter portion of the reference sphere; and calculating offset amounts Δx and Δz of the upward and downward styluses from center coordinates O3 and O4 obtained from the shape data.

First claim

What is claimed is:

1. A method of calibrating a surface texture measurement device, the device having:
a detector having a measurement arm supported swingably in a vertical direction at a rotation axis as a support point, an upward stylus and a downward stylus each provided in an end portion of the measurement arm and projecting in a swing direction of the measurement arm, and a detection unit that detects a swing amount of the measurement arm;
a stage holding a measured object…

Assignees

• Omori Yoshiyuki
• Miki Shousei
• Mitutoyo Corp

Inventors

• Omori Yoshiyuki
• Miki Shousei

Classifications

• G01B5/28

  Physics · mapped topic

• G01B21/042 Primary

  Physics · mapped topic

• G01B5/201

  Physics · mapped topic