Information displaying method and computer program product for semiconductor manufacturing apparatus
US-2024231313-A1 · Jul 11, 2024 · US
US2026086547A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2026086547-A1 |
| Application number | US-202519290737-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 5, 2025 |
| Priority date | Sep 20, 2024 |
| Publication date | Mar 26, 2026 |
| Grant date | — |
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According to an embodiment, a machine operating state monitoring system measures a current flowing through a signal light attached to a machine to be monitored. The machine operating state monitoring system determines an operating state of the signal light on the basis of a measurement result of the current. The machine operating state monitoring system stores in advance a relationship between the operating state of the signal light and the operating state of the machine to be monitored. Furthermore, the machine operating state monitoring system determines an operating state of a machine to be monitored corresponding to the determined operating state of the signal light on the basis of the stored relationship.
Opening claim text (preview).
What is claimed is: 1 . A machine operating state monitoring system, comprising: a machine to be monitored; a signal light attached to the machine to be monitored and configured to present an operating state of the machine to be monitored by changing an operating state of the signal light in accordance with the operating state of the machine to be monitored; a current sensor connected to a network and configured to detect a current value of a current flowing through the signal light; and a monitoring server configured to determine the operating state of the machine to be monitored, wherein the monitoring server includes a communication interface connected to the network, a storage device configured to store in advance a relationship between the operating state of the signal light and the operating state of the machine to be monitored, and a processor configured to receive a detection result of the current value of the current flowing through the signal light from the current sensor via the communication interface, determine the operating state of the signal light on a basis of the received detection result of the current value, and determine the operating state of the machine to be monitored that corresponds to the determined operating state of the signal light on a basis of the relationship between the operating state of the signal light and the operating state of the machine to be monitored, the relationship being stored in the storage device. 2 . The machine operating state monitoring system according to claim 1 , wherein the processor receives the detection result of the current value of the current flowing through the signal light in a measurement pattern set in advance from the current sensor via the communication interface. 3 . The machine operating state monitoring system according to claim 2 , wherein the processor transmits a measurement instruction for detecting the current value of the current flowing through the signal light in the measurement pattern set in advance to the current sensor via the communication interface, and receives the detection result of the current value of the current flowing through the signal light from the current sensor via the communication interface. 4 . The machine operating state monitoring system according to claim 1 , wherein the processor compares the received detection result of the current value with a signal light pattern that is set in advance and corresponds to the operating state of the signal light, and determines, as the operating state of the signal light, an operating state corresponding to the signal light pattern matched with the received detection result of the current value. 5 . The machine operating state monitoring system according to claim 1 , further comprising a notification destination terminal connected to the network and operated to monitor the machine to be monitored, wherein the storage device further stores in advance an address of the notification destination terminal, the address being a notification destination corresponding to the operating state of the machine to be monitored, and the processor notifies, if the address that is the notification destination to the determined operating state of the machine to be monitored is stored in the storage device, the operating state of the machine to be monitored to the notification destination terminal having the address of the notification destination via the communication interface. 6 . An information processing apparatus that monitors an operating state of a machine to be monitored, comprising: a communication interface connected to a network, a current sensor being connected to the network, the current sensor being configured to detect a current value of a current flowing through a signal light attached to the machine to be monitored and configured to present the operating state of the machine to be monitored; a storage device configured to store in advance a relationship between an operating state of the signal light and the operating state of the machine to be monitored; and a processor configured to receive a detection result of the current value of the current flowing through the signal light from the current sensor via the communication interface, determine the operating state of the signal light on a basis of the received detection result of the current value, and determine the operating state of the machine to be monitored that corresponds to the determined operating state of the signal light, on a basis of the relationship between the operating state of the signal light and the operating state of the machine to be monitored, the relationship being stored in the storage device. 7 . The information processing apparatus according to claim 6 , wherein the processor receives the detection result of the current value of the current flowing through the signal light in a measurement pattern set in advance from the current sensor via the communication interface. 8 . The information processing apparatus according to claim 7 , wherein the processor transmits a measurement instruction for detecting the current value of the current flowing through the signal light in the measurement pattern set in advance to the current sensor via the communication interface, and receives the detection result of the current value of the current flowing through the signal light from the current sensor via the communication interface. 9 . The information processing apparatus according to claim 6 , wherein the processor compares the received detection result of the current value with a signal light pattern that is set in advance and corresponds to the operating state of the signal light, and determines, as the operating state of the signal light, an operating state corresponding to the signal light pattern matched with the received detection result of the current value. 10 . An information processing method of monitoring an operating state of a machine to be monitored, the method comprising: storing in advance a relationship between an operating state of a signal light and the operating state of the machine to be monitored, the signal light being attached to the machine to be monitored and configured to present the operating state of the machine to be monitored; receiving a detection result of a current value of a current flowing through the signal light from a current sensor via a communication interface; determining the operating state of the signal light on a basis of the received detection result of the current value; and determining the operating state of the machine to be monitored that corresponds to the determined operating state of the signal light on a basis of the relationship between the operating state of the signal light and the operating state of the machine to be monitored, the relationship being stored in the storage device.
Presentation of monitored results, e.g. selection of status reports to be displayed; Filtering information to the user · CPC title
Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods · CPC title
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