Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US2026055498A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2026055498-A1 |
| Application number | US-202519242064-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 18, 2025 |
| Priority date | Aug 22, 2024 |
| Publication date | Feb 26, 2026 |
| Grant date | — |
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A mask assembly device includes a front mask mount and a rear mask mount, where each of the front mask mount and the rear mask mount includes a mask mount stand, and a bridge mount including a bridge mount stand. The bridge mount stand includes a bridge mount stand top positioned between the front mask mount and the rear mask mount, and a bridge mount stand magnet which provides a magnetic flux to the bridge mount stand top.
Opening claim text (preview).
What is claimed is: 1 . A mask assembly device comprising: a front mask mount and a rear mask mount, wherein each of the front mask mount and the rear mask mount includes a mask mount stand; and a bridge mount including a bridge mount stand, wherein the bridge mount stand includes: a bridge mount stand top positioned between the front mask mount and the rear mask mount; and a bridge mount stand magnet which provides a magnetic flux to the bridge mount stand top. 2 . The mask assembly device of claim 1 , wherein an upper surface of the bridge mount is positioned below an upper surface of the front mask mount and an upper surface of the rear mask mount, and wherein the bridge mount stand magnet is positioned below the bridge mount stand top. 3 . The mask assembly device of claim 2 , wherein the bridge mount stand further includes a bridge mount stand body coupled to the bridge mount stand top, and wherein the bridge mount stand magnet is movably coupled to the bridge mount stand body in a way such that the bridge mount stand magnet moves toward or away from the bridge mount stand top. 4 . The mask assembly device of claim 2 , wherein the bridge mount stand magnet forms a magnetic field corresponding to a current applied to the bridge mount stand magnet. 5 . The mask assembly device of claim 1 , wherein the bridge mount stand further includes: a bridge mount base; and a bridge mount leg connecting the bridge mount base to the bridge mount stand. 6 . The mask assembly device of claim 5 , wherein the bridge mount stand is coupled to the bridge mount leg in a way such that the bridge mount stand is allowed to move up and down with respect to the bridge mount base. 7 . The mask assembly device of claim 1 , wherein a suction hole is defined on an upper surface of the bridge mount stand top. 8 . The mask assembly device of claim 1 , wherein the mask mount stand includes: a mask mount stand body; a mask mount stand top defining an upper surface of a corresponding one of the front mask mount and the rear mask mount ; and a mask mount stand electrode positioned below the mask mount stand top and positioned in the mask mount stand body. 9 . The mask assembly device of claim 8 , wherein the mask mount stand top includes a material including a dielectric. 10 . A mask assembly method comprising: arranging a mask stick on an upper surface of a mask mount stand and arranging a bridge stick on an upper surface of a bridge mount stand, wherein the mask stick is positioned above the bridge stick; coupling the mask stick to the bridge stick; and welding an area in which the mask stick and the bridge stick overlap each other. 11 . The mask assembly method of claim 10 , wherein the coupling the mask stick to the bridge stick comprises: moving the bridge mount stand up to allow the bridge stick to approach the mask stick; and bringing the bridge stick into close contact with the mask stick. 12 . The mask assembly method of claim 11 , wherein the bridge mount stand includes: a bridge mount stand body; a bridge mount stand top connected to the bridge mount stand body, wherein the bridge stick is seated on an upper surface of the bridge mount stand top; and a bridge mount stand magnet positioned below the bridge mount stand top, wherein the bridge mount stand magnet provides a magnetic flux to the bridge mount stand top. 13 . The mask assembly method of claim 12 , wherein the bridge mount stand magnet is movably coupled to at least one selected from the bridge mount stand body and the bridge mount stand top, and wherein when the bridge mount stand magnet approaches the bridge mount stand top, the bridge stick is in close contact with the mask stick. 14 . The mask assembly method of claim 12 , wherein the bridge mount stand magnet includes an electromagnet, and wherein when a magnitude of a current applied to the bridge mount stand magnet increases, the bridge stick is in close contact with the mask stick. 15 . The mask assembly method of claim 12 , further comprising, after the welding: reducing an intensity of the magnetic flux provided by the bridge mount stand magnet to the bridge mount stand top; and moving the bridge mount stand down. 16 . The mask assembly method of claim 12 , wherein a suction hole is defined on the bridge mount stand top, and wherein the arranging the bridge stick on the upper surface of the bridge mount stand and coupling the mask stick to the bridge stick comprises adsorbing the bridge stick on the bridge mount stand top through the suction hole. 17 . The mask assembly method of claim 10 , wherein the arranging the mask stick on the upper surface of the mask mount stand comprises capacitively coupling the mask stick to the mask mount stand. 18 . A mask comprising: a mask stick including: a front mask stick extending in a left-right direction; and a rear mask stick extending in the left-right direction and disposed behind the front mask stick to be spaced apart from the front mask stick; and a bridge stick connecting the front mask stick to the rear mask stick, wherein the bridge stick is positioned below the front mask stick and the rear mask stick, wherein the bridge stick extends in the left-right direction, and wherein an upper surface of the bridge stick is in contact with a lower surface of the mask stick and coupled to the mask stick by welding. 19 . The mask of claim 18 , further comprising a weld bead positioned on at least one selected from the mask stick and the bridge stick. 20 . The mask of claim 19 , wherein the weld bead is positioned in an area of an upper surface of the mask stick, in which the mask stick and the bridge stick overlap each other.
using selective deposition, e.g. using a mask · CPC title
using masks · CPC title
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