High resolution advanced oled sub-pixel circuit

Patent metadata

Field	Value
Publication number	US-2026033145-A1
Application number	US-202519085314-A
Country	US
Kind code	A1
Filing date	Mar 20, 2025
Priority date	Jul 24, 2024
Publication date	Jan 29, 2026
Grant date	—

Abstract

Embodiments described herein generally relate to a display. In one or more embodiments, a sub-pixel circuit includes at least two anodes disposed over a substrate, with adjacent anodes defining a well. The sub-pixel circuit further includes adjacent overhang structures. The overhang structures include a first portion disposed in the well and a second portion disposed over the first portion, and a portion of the uppermost surface of the anode. The second portion includes overhang extensions extending past lower sidewalls of the first portion, and an upper surface. The upper surface of the second portion is above the uppermost surface of the anodes. The well has a trench area defined by the lower sidewalls and a bottom surface of the overhang extensions with a gap between the overhang extensions of the adjacent overhang structures.

First claim

What is claimed is:

1 . A method, comprising:
forming a plurality of anodes over a substrate, adjacent anodes defining a respective well; depositing a first material over the plurality of anodes and within each well defined by the plurality of anodes; removing the first material disposed over the plurality of anodes; depositing a second material over the first material and the plurality of anodes; removing a portion of the second material disposed over the plurality of anodes; etching the first material and the second material to form adjacent overhang structures within each well; and depositing an organic light emitting diode (OLED) material over the anodes, the adjacent overhang structures, and within the well.

2 . The method of claim 1 , further comprising depositing a protective layer over the plurality of anodes and within the well.

3 . The method of claim 2 , further comprising removing a portion of the protective layer disposed over an upper surface of the plurality of anodes.

4 . The method of claim 1 , wherein the first material and the second material are different, wherein the first material has a first etch rate and the second material has a second etch rate when exposed to an etchant.

5 . The method of claim 1 , wherein etching the first material and the second material further comprises:
depositing a photoresist over the plurality of anodes and a portion of the well, wherein an opening is formed in the photoresist over a center portion of the well; widening the opening with a first etching process; etching a channel through the second material and into the first material disposed within the well with a second etching process; and selectively etching the first material within the well to form the adjacent overhang structures using a third etching process.

6 . The method of claim 5 , wherein the first etching process is an anisotropic process, the second etching process is an anisotropic process, and the third etching process is an isentropic process.

7 . The method of claim 1 , further comprising depositing a cathode material over the OLED material.

8 . The method of claim 1 , further comprising depositing an encapsulation material over the OLED material and depositing a global encapsulation material over the encapsulation material.

9 . The method of claim 1 , wherein the overhang structures comprising a first portion disposed in the well and overhang extensions extend past lower sidewalls of the first portion, wherein the well has a trench area defined by the lower sidewalls and a bottom surface of the overhang extensions with a gap between the overhang extensions of the adjacent overhang structures.

10 . The method claim 1 , wherein a thickness of the adjacent overhang structures and a thickness of the plurality of anodes is substantially equivalent.

11 . A method, comprising:
forming a plurality of anodes over a substrate, each anode having an uppermost surface, adjacent anodes defining a well; depositing a first material over the plurality of anodes and within the well; removing the first material disposed over the plurality of anodes; depositing a second material over the first material and the plurality of anodes; removing a portion of the second material disposed over the plurality of anodes; etching the first material and the second material to form adjacent overhang structures within the well; depositing an organic light emitting diode (OLED) material over the anodes, the adjacent overhang structures, and within the well; depositing a cathode material over the OLED material; and depositing an encapsulation material over the cathode material.

12 . The method of claim 11 , further comprising depositing a protective layer over the plurality of anodes and within the well.

13 . The method of claim 12 , further comprising removing a portion of the protective layer disposed over an upper surface of the plurality of anodes.

14 . The method of claim 11 , wherein the first material and the second material are different, wherein the first material has a first etch rate and the second material has a second etch rate when exposed to an etchant.

15 . The method of claim 11 , wherein etching the first material and the second material further comprises:
depositing a photoresist over the plurality of anodes and a portion of the well, wherein an opening is formed in the photoresist over a center portion of the well; widening the opening with a first etching process; etching a channel through the second material and into the first material disposed within the well with a second etching process; and selectively etching the first material within the well to form the adjacent overhang structures using a third etching process.

16 . The method of claim 15 , wherein the first etching process is an anisotropic process, the second etching process is an anisotropic process, and the third etching process is an isentropic process.

17 . The method of claim 11 , wherein the adjacent overhang structures comprise:
a first portion disposed in the well, the first portion having lower sidewalls; and a second portion disposed over the first portion, the second portion having overhang extensions, wherein at least a portion of the overhang extensions extending past the lower sidewalls, wherein the well has a trench area defined by the lower sidewalls and a bottom surface of the overhang extensions with a gap between the overhang extensions of the adjacent overhang structures.

18 . The method of claim 17 , wherein a thickness of the first portion of the overhang extensions and an anode thickness are the same.

19 . The method claim 11 , wherein the plurality of anodes have a thickness from about 200 nm to about 400 nm.

20 . A method, comprising:
forming a plurality of anodes over a substrate, adjacent anodes defining a respective well; depositing a first material over the plurality of anodes and within each well defined by the plurality of anodes; removing the first material disposed over the plurality of anodes; depositing a second material over the first material and the plurality of anodes; removing a portion of the second material disposed over the plurality of anodes; etching the first material and the second material to form adjacent overhang structures within each well, the overhang structures comprising a first portion disposed in the well and overhang extensions extending past lower sidewalls of the first portion, wherein the well has a trench area defined by the lower sidewalls and a bottom surface of the overhang extensions with a gap between the overhang extensions of the adjacent overhang structures; and depositing an organic light emitting diode (OLED) material over the anodes, the adjacent overhang structures, and within the well.

Assignees

• Applied Materials Inc

Inventors

• Lee Jungmin
• Haas Dieter

Classifications

• H10K59/873

  Encapsulations · CPC title

• H10K59/122 Primary

  Pixel-defining structures or layers, e.g. banks · CPC title

• H10K59/1201

  Manufacture or treatment · CPC title