Electrodeposition systems

Patent metadata

Field	Value
Publication number	US-2026002282-A1
Application number	US-202318993833-A
Country	US
Kind code	A1
Filing date	Jul 20, 2023
Priority date	Aug 4, 2022
Publication date	Jan 1, 2026
Grant date	—

Abstract

Examples are disclosed that relate to operating an electrodeposition system comprising an inert anode. In one example system, the electrodeposition system includes a substrate holder and a cathode chamber configured to hold a catholyte. An anode chamber configured to hold an anolyte during the electrodeposition process comprises an inert anode. An intermediate chamber is positioned between the cathode chamber and the anode chamber. The intermediate chamber is separated from the cathode chamber by an ion exchange membrane.

First claim

1 . An electrodeposition system, comprising:
a substrate holder; a cathode chamber configured to hold a catholyte; an anode chamber comprising an inert anode, the anode chamber configured to hold an anolyte; and an intermediate chamber positioned between the cathode chamber and the anode chamber, the intermediate chamber separated from the cathode chamber by an ion exchange membrane.

2 . The electrodeposition system of claim 1 , wherein the intermediate chamber is separated from the anode chamber by a proton-impeding structure.

3 . The electrodeposition system of claim 2 , wherein the proton-impeding structure comprises a metal redox barrier configured to
receive growth of a metal film on an anode side of the metal redox barrier by reduction of metal ions from anolyte contacting the anode side of the metal redox barrier, and provide metal ions to a solution contacting a cathode side of the metal redox barrier by oxidation of the metal redox barrier.

4 . The electrodeposition system of claim 3 , further comprising a mechanical bias element to bias the metal redox barrier toward the intermediate chamber.

5 . The electrodeposition system of claim 3 , wherein the metal redox barrier is configured to be rotatable to allow the anode side and cathode side to alternate orientations toward the intermediate chamber.

6 . The electrodeposition system of claim 2 , wherein the proton-impeding structure comprises an anion exchange membrane.

7 . The electrodeposition system of claim 6 , wherein the ion exchange membrane that separates the intermediate chamber and the cathode chamber comprises a second anion exchange membrane.

8 . The electrodeposition system of claim 6 , wherein the ion exchange membrane that separates the intermediate chamber and the cathode chamber comprises a cation exchange membrane.

9 . The electrodeposition system of claim 6 , further comprising a redox shuttle circulation system configured to provide a redox shuttle species to the anode chamber.

10 . The electrodeposition system of claim 9 , wherein the redox shuttle circulation system comprises a redox shuttle species regeneration chamber.

11 . The electrodeposition system of claim 1 , wherein the ion exchange membrane is a first cation exchange membrane and wherein the intermediate chamber is separated from the anode chamber by a second cation exchange membrane.

12 . The electrodeposition system of claim 11 , further comprising:
a copper oxide module fluidly coupled to the intermediate chamber.

13 . An electrodeposition system, comprising:
a cathode chamber configured to hold a catholyte; a substrate holder configured to expose a substrate to the catholyte during an electrodeposition process; and an inert anode assembly comprising
one or more inert anodes,
two or more anolyte flow channels that define segmented areas of anolyte flow across the one or more inert anodes, and
an ion exchange membrane positioned between the cathode chamber and the two or more anolyte flow channels.

14 . The electrodeposition system of claim 13 , wherein the inert anode assembly further comprises a cathode chamber bottom component comprising an opening that is positioned opposite an anolyte flow channel of the two or more anolyte flow channels.

15 . The electrodeposition system of claim 14 , wherein the two or more anolyte flow channels are formed in an anolyte channel component, and wherein the ion exchange membrane is positioned between the cathode chamber bottom component and the anolyte channel component.

16 . The electrodeposition system of claim 15 , wherein the inert anode assembly further comprises an intermediate channel component positioned between the cathode chamber bottom component and the anolyte channel component, wherein the ion exchange membrane is a first ion exchange membrane positioned between the intermediate channel component and the anolyte channel component, and further comprising a second ion exchange membrane positioned between the cathode chamber bottom component and the intermediate channel component.

17 . An electrodeposition system, comprising:
a cathode chamber configured to hold a catholyte; an anode chamber configured to hold an anolyte; a membrane frame supporting an ion exchange membrane positioned between the cathode chamber and the anode chamber; a substrate holder configured to expose a substrate to the catholyte during an electrodeposition process; an inert anode positioned within the anode chamber; and a bubble diverter positioned to direct a flow of bubbles generated at the inert anode to a stilling structure at which the bubbles are vented to atmosphere.

18 . The electrodeposition system of claim 17 , wherein the bubble diverter extends around a peripheral portion of the ion exchange membrane.

19 . The electrodeposition system of claim 17 , further comprising an anolyte circulation loop comprising a circulation pump, wherein the bubble diverter directs the flow of bubbles to the anolyte circulation loop, and wherein the stilling structure is positioned upstream of the circulation pump, the stilling structure being exposed to atmosphere.

20 . The electrodeposition system of claim 19 , wherein the anolyte circulation loop further comprises a contactor downstream of the stilling structure and upstream of the circulation pump, the contactor configured to remove dissolved gases from the anolyte.

Assignees

• Lam Res Corp

Inventors

• He Zhian
• Subbaiyan Navaneetha Krishnan
• Deshmukh Swapnil Dattatray
• Sweeney Cian
• Smedley Benjamin
• Reid Jonathan
• Ghongadi Shantinath

Classifications

• C25D21/22

  by ion-exchange · CPC title

• C25D21/18

  of electrolytes (C25D21/22 takes precedence) · CPC title

• C25D21/10

  Agitating of electrolytes; Moving of racks · CPC title

• C25D21/04

  Removal of gases or vapours {; Gas or pressure control} · CPC title

• C25D17/06

  Suspending or supporting devices for articles to be coated · CPC title