Pressure sensor and electronic equipment

Patent metadata

Field	Value
Publication number	US-2025389605-A1
Application number	US-202519317476-A
Country	US
Kind code	A1
Filing date	Sep 3, 2025
Priority date	Apr 17, 2023
Publication date	Dec 25, 2025
Grant date	—

Abstract

A pressure sensor that includes a substrate; a detection element on the substrate; and a covering member on the substrate and defining an exposure hole that exposes at least part of the detection element to an outside, and covering the detection element by a portion excluding the exposure hole. The covering member having: a main body having an upper surface on the opposite side to a surface thereof facing the substrate, and a protrusion that protrudes from the upper surface of the main body and through which the exposure hole extends. The main body has at least one recess in the upper surface along the protrusion in a plan view as viewed in the thickness direction of the substrate and that hollows along the thickness direction. The at least one recess extends around at least part of the protrusion in a circumferential direction thereof in the plan view.

First claim

1 . A pressure sensor comprising:
a substrate; a detection element on the substrate; and a covering member on the substrate and defining an exposure hole that exposes at least part of the detection element to an outside, the covering member covering the detection element by a portion excluding the exposure hole, the covering member having:
a main body having an upper surface on an opposite side to a surface thereof facing the substrate, and
a protrusion that protrudes from the upper surface of the main body, the exposure hole extending through the protrusion,
the main body having at least one recess in the upper surface along the protrusion in a plan view as viewed in a thickness direction of the substrate and that hollows along the thickness direction, and
the at least one recess extends around at least part of the protrusion in a circumferential direction of the protrusion in the plan view.

2 . The pressure sensor according to claim 1 , wherein an outer edge of a lower end of the protrusion forms an edge of an opening of the recess.

3 . The pressure sensor according to claim 2 , wherein
the main body has the at least one recess around part of the protrusion in the circumferential direction of the protrusion in the plan view, and the upper surface of the main body has a non-recess region adjacent to the protrusion and in which the recess is not present.

4 . The pressure sensor according to claim 3 , wherein the at least one recess comprises a plurality of recesses, and the main body has the plurality of recesses arranged at equal intervals in the circumferential direction of the protrusion in the plan view.

5 . The pressure sensor according to claim 4 , wherein
the main body has a rectangular shape having four corner portions in the plan view, the protrusion has a circular shape in the plan view, and each of the plurality of recesses is located between one of the four corner portions and the protrusion in the plan view.

6 . The pressure sensor according to claim 5 , wherein the plurality of recesses comprise four recesses.

7 . The pressure sensor according to claim 1 , wherein
the main body has the at least one recess around part of the protrusion in the circumferential direction of the protrusion in the plan view, and the upper surface of the main body has a non-recess region adjacent to the protrusion and in which the recess is not present.

8 . The pressure sensor according to claim 7 , wherein the at least one recess comprises a plurality of recesses, and the main body has the plurality of recesses arranged at equal intervals in the circumferential direction of the protrusion in the plan view.

9 . The pressure sensor according to claim 8 , wherein
the main body has a rectangular shape having four corner portions in the plan view, the protrusion has a circular shape in the plan view, and each of the plurality of recesses is located between one of the four corner portions and the protrusion in the plan view.

10 . The pressure sensor according to claim 9 , wherein the plurality of recesses comprise four recesses.

11 . The pressure sensor according to claim 1 , wherein the at least one recess comprises a single recess, and the main body has the single recess extending around an entire circumference of the protrusion in the plan view.

12 . The pressure sensor according to claim 1 , wherein the main body has a first thickness between a lower surface of the main body and a bottom surface of the recess, the main body has a second thickness between the lower surface of the main body and the upper surface between an outer edge portion of the main body and the recess, and the second thickness is larger than the first thickness.

13 . The pressure sensor according to claim 1 , further comprising:
an O-ring that surrounds the protrusion in the plan view and is in contact with an outer wall surface of the protrusion, wherein a length of the at least one recess in a direction parallel to a width of the O-ring is shorter than the width of the O-ring in at least part of the recess.

14 . Electronic equipment comprising:
the pressure sensor according to claim 13 ; and a casing having a casing recess constructed to receive the protrusion, wherein the O-ring is in contact with an inner surface of the casing recess and the outer wall surface of the protrusion, and a part of the O-ring is in the recess.

15 . The electronic equipment according to claim 14 , wherein an outer edge of a lower end of the protrusion forms an edge of an opening of the recess.

16 . The electronic equipment according to claim 14 , wherein
the main body has the at least one recess around part of the protrusion in the circumferential direction of the protrusion in the plan view, and the upper surface of the main body has a non-recess region adjacent to the protrusion and in which the recess is not present.

17 . The electronic equipment according to claim 16 , wherein the at least one recess comprises a plurality of recesses, and the main body has the plurality of recesses arranged at equal intervals in the circumferential direction of the protrusion in the plan view.

18 . The electronic equipment according to claim 17 , wherein
the main body has a rectangular shape having four corner portions in the plan view, the protrusion has a circular shape in the plan view, and each of the plurality of recesses is located between one of the four corner portions and the protrusion in the plan view.

19 . The electronic equipment according to claim 18 , wherein the plurality of recesses comprise four recesses.

20 . The electronic equipment according to claim 14 , wherein the at least one recess comprises a single recess, and the main body has the single recess extending around an entire circumference of the protrusion in the plan view.

Assignees

• Murata Manufacturing Co

Inventors

• Yoshida Yoshihiro
• Uchida Mami

Classifications

• G01L19/147

  Details about the mounting of the sensor to support or covering means · CPC title

• G01L19/143 Primary

  Two part housings · CPC title

• G01L9/00

  Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements {(G01L11/004 takes precedence)}; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (measuring differences of two or more pressure values G01L13/00; measuring two or more pressure values simultaneously G01L15/00) · CPC title