Sensor and electronic device

Patent metadata

Field	Value
Publication number	US-2025383366-A1
Application number	US-202519036137-A
Country	US
Kind code	A1
Filing date	Jan 24, 2025
Priority date	Jun 13, 2024
Publication date	Dec 18, 2025
Grant date	—

Abstract

According to one embodiment, a sensor includes a mounting member, a sensor section, and a fixing member. The mounting member includes a first mounting portion. The sensor section includes a sensor base and a first sensor part. The sensor base includes a first region, a second region, and a first end. The first region is between the second region and the first end. The first sensor part includes a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region. A first gap is provided between the first region and the first movable portion. The fixing member fixes the second region to the first mounting portion. The first end is a free end.

First claim

What is claimed is:

1 . A sensor, comprising:
a mounting member including a first mounting portion; a sensor section including a sensor base and a first sensor part, the sensor base including a first region, a second region, and a first end, the first region being between the second region and the first end, the first sensor part including a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region, a first gap being provided between the first region and the first movable portion; and a fixing member fixing the second region to the first mounting portion, the first end being a free end.

2 . The sensor according to claim 1 , wherein
a second gap is provided between the first mounting portion and the first region.

3 . The sensor according to claim 2 , wherein
a second direction from the first region to the first end crosses a first direction from the first region to the first support portion.

4 . The sensor according to claim 3 , wherein
the first movable portion includes a first movable electrode, and the first movable electrode faces the first fixed electrode in the second direction.

5 . The sensor according to claim 4 , wherein
a first signal generated between the first movable electrode and the first fixed electrode is configured to change according to an acceleration applied to the sensor section.

6 . The sensor according to claim 4 , wherein
the first movable portion further includes a first movable base, a second movable base, and a first beam, a part of the first beam is connected to the first movable base, another part of the first beam is connected to the second movable base, the first beam extends along a third direction, the third direction crosses a plane including the first direction and the second direction, and the first movable electrode is connected to the first beam.

7 . The sensor according to claim 6 , wherein
the first sensor part further includes a second fixed electrode fixed to the first region, the first movable portion further includes a second movable electrode, the second movable electrode faces the second fixed electrode in the second direction, the first movable portion further includes a second other movable base and a second beam, a part of the second beam is connected to the second other movable base, another part of the second beam is connected to the first movable base, the second beam extends along the third direction, the second movable electrode is connected to the second beam, and a first resonant frequency of the first beam and a second resonant frequency of the second beam are configured to change according to an acceleration applied to the sensor section.

8 . The sensor according to claim 3 , wherein
a first change rate of a first curvature of the first region in the second direction with respect to temperature is lower than a second change rate of a second curvature of the second region in the second direction with respect to the temperature.

9 . The sensor according to claim 3 , wherein
a part of the fixing member is provided between the first mounting portion and the second region, and another part of the fixing member does not overlap the second region.

10 . The sensor according to claim 3 , wherein
the second region includes a first side face crossing a plane crossing the first direction, and the fixing member contacts the first side face.

11 . The sensor according to claim 3 , wherein
the fixing member is provided between the first mounting portion and the second region.

12 . The sensor according to claim 3 , wherein
a plurality of the fixing members are provided, and a direction from one of the plurality of fixing members to another one of the plurality of fixing members crosses the first direction and crosses the second direction.

13 . The sensor according to claim 3 , wherein
a plurality of the fixing members are provided, and a direction from one of the plurality of fixing members to another one of the plurality of fixing members crosses the first direction and is along the second direction.

14 . The sensor according to claim 3 , wherein
the sensor base further includes a second end, a direction from the second end to the first region crosses a plane including the first direction and the second direction, and the second end is a free end.

15 . The sensor according to claim 14 , wherein
the sensor section further includes a second sensor part, the second sensor part includes:
a second support portion fixed to the first region;
a second movable portion supported by the second support portion; and
a second fixed electrode fixed to the first region, and
a part of the first gap is provided between the first region and the second movable portion.

16 . The sensor according to claim 2 , wherein
the sensor base further includes a third region and a third end, the second region is between the third region and the first region, a direction from the third end to the third region is along a direction from the first region to the first end, and the third end is a free end.

17 . The sensor according to claim 16 , further comprising:
a second sensor part, the second sensor part including:
a second support portion fixed to the third region;
a second movable portion supported by the second support portion; and
a second fixed electrode fixed to the third region, and
a third gap being provided between the third region and the second movable portion.

18 . The sensor according to claim 4 , wherein
the first movable portion further includes a first beam, a part of the first beam is connected to the first support portion, another part of the first beam is connected to the first movable electrode, the first beam extends along a third direction, and the third direction crosses a plane including the first direction and the second direction.

19 . The sensor according to claim 18 , wherein
the first sensor part further includes a first opposing fixed electrode fixed to the first region, the first movable portion further includes a first opposing movable electrode, the first opposing movable electrode faces the first opposing fixed electrode in the second direction, the first movable electrode is between the first fixed electrode and the first opposing fixed electrode, and the first opposing movable electrode is between the first movable electrode and the first opposing fixed electrode.

20 . An electronic device comprising:
the sensor according to claim 1 ; and a circuit controller configured to control a circuit based on a signal obtained from the sensor.

Assignees

• Toshiba Kk

Inventors

• Masunishi Kei
• Ogawa Etsuji
• Tomizawa Yasushi
• Uchida Kengo
• ISHIBASHI Fumitaka
• Ono Daiki
• Miyazaki Fumito
• Murase Hideaki
• Ogawa Jumpei

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P15/097

  by vibratory elements · CPC title

• G01P1/023 Primary

  for acceleration measuring devices · CPC title

• G01P1/006

  used for thermal compensation · CPC title

• G01P2015/0828

  the mass being of the paddle type being suspended at one of its longitudinal ends · CPC title