Method for manufacturing three-dimensional structure using conductive floating mask

Patent metadata

Field	Value
Publication number	US-2025375815-A1
Application number	US-202218730160-A
Country	US
Kind code	A1
Filing date	Sep 19, 2022
Priority date	Jan 24, 2022
Publication date	Dec 11, 2025
Grant date	—

Abstract

The present invention may be configured to: apply, while maintaining a separation distance (d) between a substrate and a conductive mask, different electric potentials to each of the substrate and the mask to form an electric field due to an electric potential difference; to make charged nanoparticles pass through a hole of the mask according to the intensity of the electric field to determine the degree to which the charged nanoparticles are focused on the substrate; and control the size and shape of a three-dimensional structure formed by depositing the nanoparticles on the substrate according to the focusing degree.

First claim

1 . A method of manufacturing a three-dimensional structure, the method comprising:
(S1) a step of disposing a lower substrate and a conductive mask provided with a plurality of holes above the lower substrate to be spaced apart within a grounded reactor; (S2) a step of forming an electrostatic lens around the hole of the mask by generating electric fields of different sizes in the conductive mask and the lower substrate, respectively; (S3) a step of introducing charged nanoparticles through an upper inlet of the reactor to induce passage through the mask hole by the electrostatic lens and deposition on the lower substrate; and
one or more steps of the following steps (S4) and (S5):
(S4) a step of adjusting an electric field intensity between the conductive mask and the substrate to induce a change in size of a structure; and
(S5) a step of controlling a shape of a growing three-dimensional nanostructure while transporting the lower substrate in three dimensions.

2 . The method of claim 1 , wherein the conductive mask is provided with a thin metal film coating layer on one or both sides of a film substrate or is in the form of a metal mesh.

3 . The method of claim 2 , wherein the thin metal film coating layer or the metal mesh comprises chromium (Cr), gold (Au), or a mixture thereof.

4 . The method of claim 1 , wherein the substrate comprises silicon (Si), indium tin oxide (ITO), or silicon carbide (SiC).

5 . The method of claim 1 , wherein the electric field intensity between the conductive mask and the substrate is 5 V/μm to 200 V/μm.

6 . The method of claim 5 , wherein the electric field intensity between the conductive mask and the substrate is 16.67 V/μm to 100 V/μm.

7 . The method of claim 1 , wherein an intensity of the electric field (E nom ) generated in the step (S2) satisfies the following Equation 1:

E

n
⁢
o
⁢
m

=

electrical
⁢

potential
⁢

of
⁢

substrate
⁢

(
V
)

/
moving

⁢

distance
⁢

of
⁢

charged
⁢

nanoparticles
⁢

(
μm
)

.

[

Equation
⁢

1

]

8 . The method of claim 7 , wherein the moving distance of the charged nanoparticles is a distance between the upper inlet of the reactor and the substrate.

9 . A three-dimensional structure manufactured by the method according to claim 1 , wherein the three-dimensional structure has a size that satisfies the following Equation 2:

W
D

=

W
⁡
(

α
⁢

E
nom

⁢
d

Δ
⁢
V

)

1
2

⁢

(

2

π

)

[

Equation
⁢

2

]

wherein W D is a diameter (μm) of a stump of the three-dimensional structure,
W is a spacing (μm) between the holes provided in the conductive mask,
ΔV is an electric potential difference (V) between the conductive mask and the lower substrate,
d is a separation distance (μm) between the conductive mask and the lower substrate,

α is a constant, and
E nom is an intensity of an electric field (V/μm) generated by the electric potential difference between the conductive mask and the lower substrate.

10 . The three-dimensional structure of claim 9 , wherein the value of α in the Equation 2 is 5.

11 . An apparatus for manufacturing a three-dimensional structure for use in the method according to claim 1 , comprising:
a grounded reactor; a lower substrate located within the grounded reactor; a conductive mask disposed to be spaced apart above the lower substrate within the grounded reactor and provided with a plurality of holes; an electric field applying means for generating electric fields of different sizes in the conductive mask and the lower substrate, respectively, to form an electrostatic lens around the hole of the mask; a nanoparticle introducing means for introducing charged nanoparticles into an upper part of the conductive mask; an electric field adjusting means for adjusting the sizes of the electric fields applied to the conductive mask and the lower substrate; and a transporting means for transporting the lower substrate in three dimensions.

12 . The apparatus of claim 11 , wherein the conductive mask is

Assignees

• Global Frontier Ct Multiscale Energy Systems
• Seoul Nat Univ R&Db Foundation

Inventors

• Choi Mansoo
• Pikhitsa Peter V
• Jung Yoon-Ho
• Shin Jooyeon
• Jung Wooik
• Hur Changnyeong
• Cho Wonjin

Classifications

• C23C14/042

  using masks · CPC title

• B22F12/50

  Means for feeding of material, e.g. heads · CPC title

• B22F12/30

  Platforms or substrates · CPC title

• B22F10/25 Primary

  Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS] · CPC title

• B33Y30/00

  Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title