Processing system and processing method

Patent metadata

Field	Value
Publication number	US-2025339920-A1
Application number	US-202519250308-A
Country	US
Kind code	A1
Filing date	Jun 26, 2025
Priority date	Oct 31, 2018
Publication date	Nov 6, 2025
Grant date	—

Abstract

A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a part that is related to the light receiving apparatus. The processing system moves the object placing apparatus to a position at which the light receiving apparatus optically receives the energy beam and moves the object placing apparatus to a position at which the measurement apparatus measures a position of the light receiving apparatus.

First claim

1 . A processing system that is configured to perform an additive manufacturing by supplying a build material while irradiating a workpiece with processing light, the processing system comprising:
a reflection member that deflects the processing light so as to move an irradiation area, which is irradiated with the processing light, on the workpiece; and a control apparatus that is configured to perform a control for changing a relative positional relationship between the irradiation area and a supply area to which the build material is supplied.

2 . The processing system according to claim 1 , wherein
the control apparatus controls the relative positional relationship by controlling a moving aspect of the irradiation area.

3 . The processing system according to claim 2 , wherein
the moving aspect includes at least one of a moving distance, a moving speed, a moving direction, and a moving timing.

4 . The processing system according to claim 1 , wherein
the control apparatus controls the relative positional relationship by controlling at least one of a position and a direction of an irradiation of the processing light.

5 . The processing system according to claim 1 , wherein
the reflection member includes a first mirror that scans the reflected processing light along a first direction and a second mirror that scans the reflected processing light along a second direction intersecting the first direction.

6 . The processing system according to claim 1 , further comprising a material supply apparatus that is configured to supply the build material.

7 . The processing system according to claim 6 , wherein
the control apparatus controls the relative positional relationship by controlling the material supply apparatus.

8 . The processing system according to claim 7 , wherein
the control apparatus controls the relative positional relationship by controlling at least one of a position and a direction of the material supply apparatus.

9 . The processing system according to claim 1 further comprising a measurement apparatus that measures the workpiece, wherein
the control apparatus sets a processing condition based on a processed result by the additive manufacturing, which is measured by using the measurement apparatus.

10 . The processing system according to claim 9 , wherein
the processing condition includes a moving aspect of the irradiation area.

11 . The processing system according to claim 9 , wherein
the processing condition includes at least one of an emitting aspect of the processing light and a supply aspect of the build material.

12 . A processing system comprising:
an additive manufacturing apparatus that is configured to perform an additive manufacturing by supplying a build material while irradiating a workpiece with processing light; a measurement apparatus that is configured to measure the workpiece; and a control apparatus; wherein the control apparatus is configured to make the measurement apparatus measure a processed result by the additive manufacturing apparatus, and to perform a control for changing a relative positional relationship between an irradiation area, which is irradiated with the processing light, and a supply area, to which the build material is supplied, based on a measured result.

13 . The processing system according to claim 12 , wherein
the additive manufacturing apparatus includes a light irradiation apparatus that is configured to irradiate the workpiece with the processing light and a material supply apparatus that is configured to supply the build material to the supply area.

14 . The processing system according to claim 13 , wherein
the control apparatus controls the relative positional relationship by controlling a moving aspect of the irradiation area.

15 . The processing system according to claim 14 , wherein
the moving aspect includes at least one of a moving distance, a moving speed, a moving direction, and a moving timing.

16 . The processing system according to claim 13 , wherein
the control apparatus controls the relative positional relationship by controlling at least one of a position and a direction of an irradiation of the processing light.

17 . The processing system according to claim 13 , wherein
the control apparatus controls the relative positional relationship by moving the material supply apparatus.

18 . The processing system according to claim 17 , wherein
the control apparatus controls the relative positional relationship by controlling at least one of a position and a direction of the material supply apparatus.

19 . A processing method comprising:
performing an additive manufacturing by supplying a build material while irradiating a workpiece with processing light; moving an irradiation area, which is irradiated with the processing light, on the workpiece; and changing a relative positional relationship between the irradiation area and a supply area, to which the build material is supplied, based on a measured result of a processed result by the additive manufacturing.

20 . The processing method according to claim 19 , wherein
the performing the additive manufacturing includes irradiating the workpiece with the processing light and supplying the build material to the supply area.

21 . The processing method according to claim 19 , wherein
the changing the relative positional relationship includes changing the relative positional relationship by controlling a moving aspect that includes at least one of a moving distance, a moving speed, a moving direction, and a moving timing of the irradiation area.

22 . The processing method according to claim 19 , wherein
the changing the relative positional relationship includes changing at least one of a position and a direction of an irradiation of the processing light.

23 . The processing method according to claim 19 , wherein
the changing the relative positional relationship includes moving a material supply apparatus that supplies the build material.

24 . The processing method according to claim 23 , wherein
the changing the relative positional relationship includes changing the relative positional relationship by changing at least one of a position and a direction of the material supply apparatus.

Assignees

• Nikon Corp

Inventors

• Egami Shigeki
• Tatsuzaki Yosuke

Classifications

• B23K26/04

  Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light · CPC title

• B23K26/0853

  Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane · CPC title

• B23K26/50

  Working by transmitting the laser beam through or within the workpiece · CPC title

• B23K26/032 Primary

  using optical means · CPC title

• B23K26/08

  Devices involving relative movement between laser beam and workpiece · CPC title