Patterning overhang as touch electrodes

Patent metadata

Field	Value
Publication number	US-2025311585-A1
Application number	US-202519097559-A
Country	US
Kind code	A1
Filing date	Apr 1, 2025
Priority date	Apr 2, 2024
Publication date	Oct 2, 2025
Grant date	—

Abstract

Devices with sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a substrate, a plurality of overhang structures disposed over the substrate where the overhang structures include a first structure, a second structure. The device further includes a plurality of sub-pixels defined by the overhang structures where each sub-pixel includes an organic light emitting diode (OLED) material disposed between the overhang structures, a cathode disposed over the OLED material, and an encapsulation layer disposed over the cathode and the second structure over each of the overhang structures. The device further includes an intermediate layer disposed over the encapsulation layer and a global passivation layer disposed over the intermediate layer. The device further includes a first touch electrode disposed over the second structure and a second touch electrode disposed over the global passivation layer.

First claim

What is claimed is:

1 . A device, comprising:
a substrate; a plurality of overhang structures disposed over the substrate, each overhang structure of the plurality of overhang structures comprising:
a first structure;
a second structure; and
adjacent overhangs, each overhang of the adjacent overhangs defined by an overhang extension of the second structure extending laterally past an upper surface of the first structure;
a first touch electrode disposed over the second structure; a plurality of sub-pixels defined by the plurality of overhang structures, each sub-pixel comprising:
an organic light emitting diode (OLED) material disposed between the overhang structures;
a cathode disposed over the OLED material; and
an encapsulation layer disposed over the cathode and at least the second structure of each overhang structure of the plurality of overhang structures;
an intermediate layer disposed over the encapsulation layer; and a second touch electrode disposed over the intermediate layer.

2 . The device of claim 1 , wherein the cathode has an endpoint before the first structure.

3 . The device of claim 1 , wherein the second structure and the first structure are comprised of a conductive material.

4 . The device of claim 3 , wherein the conductive material includes one or more of a transparent conductive oxide (TCO), copper (Cu), aluminum (Al), aluminum neodymium (AlNd), molybdenum (Mo), molybdenum tungsten (MoW), titanium (Ti), or combinations thereof.

5 . The device of claim 1 , wherein the encapsulation layer comprises a dielectric material.

6 . The device of claim 1 , wherein the first structure is comprised of a nonconductive material and the second structure is comprised of a conductive material.

7 . The device of claim 6 , wherein the nonconductive material includes amorphous silicon (a-Si), silicon nitride (Si 3 N 4 ), silicon oxide (SiO 2 ), silicon oxynitride (Si 2 N 2 O), or combinations thereof and the conductive material includes the conductive material includes a transparent conductive oxide, copper (Cu), aluminum (Al), aluminum neodymium (AlNd), molybdenum (Mo), molybdenum tungsten (MoW), titanium (Ti), or combinations thereof.

8 . The device of claim 1 , wherein the device further comprises a global passivation layer disposed over the intermediate layer.

9 . The device of claim 1 , wherein the intermediate layer is planarized.

10 . The device of claim 1 , wherein the first touch electrode and the second touch electrode comprise a transparent conductive oxide (TCO), a metal-containing layer, a metal, or combinations thereof.

11 . A device, comprising:
a substrate; a plurality of overhang structures disposed over the substrate, each overhang structure of the plurality of overhang structures comprising:
a first structure;
a second structure; and
adjacent overhangs, each overhang of the adjacent overhangs defined by an overhang extension of the second structure extending laterally past an upper surface of the first structure;
a first touch electrode disposed over the second structure; a plurality of sub-pixels defined by the plurality of overhang structures, each sub-pixel comprising:
an organic light emitting diode (OLED) material disposed between the overhang structures;
a cathode disposed over the OLED material; and
an encapsulation layer disposed over the cathode and at least the second structure of each overhang structure of the plurality of overhang structures;
an intermediate layer disposed over the encapsulation layer; a global passivation layer disposed over the intermediate layer; and a second touch electrode disposed over the global passivation layer.

12 . The device of claim 11 , further comprising an assistance cathode disposed under each overhang structure of the plurality of overhang structures.

13 . The device of claim 12 , wherein the assistance cathode includes a protrusion, the protrusion extending at least past the first structure.

14 . The device of claim 12 , wherein the assistance cathode comprises a transparent conductive oxide (TCO), a copper (Cu), aluminum (Al), aluminum neodymium (AlNd), molybdenum (Mo), molybdenum tungsten (MoW), titanium (Ti), or combinations thereof.

15 . The device of claim 12 , wherein the cathode contacts the assistance cathode.

16 . The device of claim 11 , wherein the encapsulation layer is a dielectric layer.

17 . A device, comprising:
a substrate; a plurality of overhang structures disposed over the substrate, each overhang structure of the plurality of overhang structures comprising:
a first structure;
a second structure comprising a conductive material; and
adjacent overhangs, each overhang of the adjacent overhangs defined by an overhang extension of the second structure extending laterally past an upper surface of the first structure;
a plurality of sub-pixels defined by the plurality of overhang structures, each sub-pixel comprising:
an organic light emitting diode (OLED) material disposed between the overhang structures;
a cathode disposed over the OLED material; and
an encapsulation layer disposed over the cathode and at least the second structure of each overhang structure of the plurality of overhang structures;
an intermediate layer disposed over the encapsulation layer; a global passivation layer disposed over the intermediate layer; and a touch electrode disposed over the global passivation layer that is over the second structure.

18 . The device of claim 17 , wherein the encapsulation layer is a dielectric layer.

19 . The device of claim 17 , further comprising a conductive body disposed under each overhang structure of the plurality of overhang structures.

20 . The device of claim 17 , wherein the touch electrode comprises a transparent conductive oxide (TCO), a metal-containing layer, a metal, or combinations thereof.

Assignees

• Applied Materials Inc

Inventors

• Chen Chung-Chia
• Lin Yu-Hsin
• Choung Ji Young
• Wang sheng-wen
• Lee Jungmin

Classifications

• H10K59/873

  Encapsulations · CPC title

• H10K59/80522

  combined with auxiliary electrodes · CPC title

• H10K59/80521

  characterised by their shape · CPC title

• H10K59/40 Primary

  OLEDs integrated with touch screens · CPC title

• H10K59/122 Primary

  Pixel-defining structures or layers, e.g. banks · CPC title