Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
Physical Quantity Sensor And Inertial Measurement Unit
US2025306057A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025306057-A1 |
| Application number | US-202519095381-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 31, 2025 |
| Priority date | Apr 1, 2024 |
| Publication date | Oct 2, 2025 |
| Grant date | — |
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- Title
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Abstract
Official abstract text for this publication.
A physical quantity sensor 100 includes a support substrate 10 and a movable body 20 movably provided with respect to the support substrate 10, the movable body 20 includes a perforated region D1 having a through hole 26, a blank region D2 having no through hole 26, and a conductive film 27 provided in the blank region D2 on a lower surface 20f facing the support substrate 10, and the support substrate 10 includes a protrusion 15 overlapping the conductive film 27 in plan view.
First claim
Opening claim text (preview).
What is claimed is: 1 . A physical quantity sensor comprising: a substrate; and a movable body movably provided with respect to the substrate, wherein the movable body includes: on a first surface facing the substrate, a first region having a through hole; a second region not having the through hole; and a first conductive film provided in the second region, and the substrate includes a protrusion overlapping the first conductive film in plan view. 2 . The physical quantity sensor according to claim 1 , wherein the first conductive film is a noble metal. 3 . The physical quantity sensor according to claim 1 , wherein the substrate includes a second conductive film covering the protrusion, and a material of the first conductive film and a material of the second conductive film are same. 4 . The physical quantity sensor according to claim 3 , wherein a film thickness of the first conductive film is smaller than a film thickness of the second conductive film. 5 . The physical quantity sensor according to claim 1 , wherein the first conductive film is larger than the protrusion in plan view. 6 . The physical quantity sensor according to claim 1 , wherein a surface roughness of a third region of the first surface where the first conductive film is not provided is larger than a surface roughness of the first conductive film. 7 . The physical quantity sensor according to claim 1 , wherein a surface roughness of the first surface is larger than a surface roughness of a second surface opposite to the first surface. 8 . An inertial measurement unit comprising a physical quantity sensor according to claim 1 .
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using stopper structures for limiting the travel of the seismic mass · CPC title
Details · CPC title
the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration · CPC title
- G01P15/125Primary
by capacitive pick-up · CPC title
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- What does patent US2025306057A1 cover?
- A physical quantity sensor 100 includes a support substrate 10 and a movable body 20 movably provided with respect to the support substrate 10, the movable body 20 includes a perforated region D1 having a through hole 26, a blank region D2 having no through hole 26, and a conductive film 27 provided in the blank region D2 on a lower surface 20f facing the support substrate 10, and the support s…
- Who is the assignee on this patent?
- Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification G01P15/125. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Oct 02 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).