Superconducting device with multiple wiring

US2025259766A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2025259766-A1
Application numberUS-202418437196-A
CountryUS
Kind codeA1
Filing dateFeb 8, 2024
Priority dateFeb 8, 2024
Publication dateAug 14, 2025
Grant date

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

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A superconducting device includes a first layer, an intermediate layer over the first layer, and a second layer over the intermediate layer. The intermediate layer is configured to decrease strain in the first layer.

First claim

Opening claim text (preview).

What is claimed is: 1 . A superconducting device, comprising: a first layer; an intermediate layer over the first layer; and a second layer over the intermediate layer, wherein the intermediate layer is configured to decrease strain in the first layer. 2 . The superconducting device of claim 1 , wherein the first layer is a metallic layer. 3 . The superconducting device of claim 2 , wherein the metallic layer includes Niobium (Nb). 4 . The superconducting device of claim 1 , wherein the second layer includes silicon oxide. 5 . The superconducting device of claim 1 , wherein the intermediate layer is a silicon-rich layer. 6 . A method for fabricating a superconducting device, the method comprising: forming a first layer; forming an intermediate layer over the first layer; and forming a second layer over the intermediate layer, wherein the intermediate layer is configured to decrease strain in the first layer. 7 . The method of claim 6 , wherein forming the first layer comprises forming a metallic layer, and wherein the metallic layer includes Niobium (Nb). 8 . The method of claim 6 , wherein forming the intermediate layer comprises forming a silicon-rich layer. 9 . The method of claim 8 , further comprising: flowing a silane gas into a vacuum chamber; and forming the silicon-rich layer over the first layer, wherein the silane gas is flown into the vacuum chamber at a flow rate of about 260 standard cubic centimeter (sccm), and wherein the vacuum chamber is at a temperature of about 400 degrees Celsius. 10 . The method of claim 9 , wherein a pressure of the vacuum chamber is about 2.7 Torr, and wherein the silane gas is flown for about 30 seconds to about 120 seconds into the vacuum chamber. 11 . The method of claim 6 , wherein forming the second layer comprises forming a silicon oxide layer. 12 . The method of claim 11 , further comprising: simultaneously flowing a silane gas and a nitrous oxide gas into a vacuum chamber; igniting a plasma in the vacuum chamber; and forming the second layer over the intermediate layer. 13 . The method of claim 12 , wherein the silane gas is flown into the vacuum chamber at a first flow rate of about 260 standard cubic centimeter (sccm), and the nitrous oxide gas is flown into the vacuum chamber at a second flow rate of about 3900 sccm, wherein the vacuum chamber is at a temperature of about 400 degrees Celsius, and wherein the plasma is ignited at about 300 Watts. 14 . The method of claim 12 , wherein a pressure of the vacuum chamber is about 2.7 Torr. 15 . The method of claim 6 , wherein forming the second layer is performed via a plasma-enhanced chemical vapor deposition (PECVD) technique. 16 . A superconducting device, comprising: a first layer; an intermediate layer over the first layer; and a second layer over the intermediate layer, wherein the intermediate layer is configured to increase a critical transition temperature of the first layer. 17 . The superconducting device of claim 16 , wherein the first layer is a metallic layer. 18 . The superconducting device of claim 17 , wherein the metallic layer includes Niobium (Nb). 19 . The superconducting device of claim 16 , wherein the second layer includes silicon oxide. 20 . The superconducting device of claim 16 , wherein the intermediate layer is a silicon-rich layer.

Assignees

Inventors

Classifications

  • Graded interfaces · CPC title

  • Silicon dioxide · CPC title

  • Deposition of silicon only · CPC title

  • characterised by the deposition of metallic material · CPC title

  • Films or wires on bases or cores · CPC title

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Frequently asked questions

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What does patent US2025259766A1 cover?
A superconducting device includes a first layer, an intermediate layer over the first layer, and a second layer over the intermediate layer. The intermediate layer is configured to decrease strain in the first layer.
Who is the assignee on this patent?
IBM
What technology area does this patent fall under?
Primary CPC classification H01J37/32816. Mapped technology areas include Electricity.
When was this patent published?
Publication date Thu Aug 14 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).