Venting hole on passivation layer on top of gap-fill

Patent metadata

Field	Value
Publication number	US-2025248220-A1
Application number	US-202418750987-A
Country	US
Kind code	A1
Filing date	Jun 21, 2024
Priority date	Jan 31, 2024
Publication date	Jul 31, 2025
Grant date	—

Abstract

Embodiments of the present disclosure relate to sub-pixel devices and methods related to relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The sub-pixel includes a substrate, overhang pixel isolation structures (PIS), overhang structures, where the overhang structures include an extension disposed past a sidewall of the overhang structures, separation PIS, a metal structure disposed over the substrate, an inorganic layer disposed over each overhang PIS and over each separation PIS, where the inorganic layer includes a plurality of openings, organic light-emitting diode (OLED) material disposed over the metal structure, where the OLED material is disposed between the inorganic layer under each extension of the overhang structures, and a cathode disposed over the OLED material.

First claim

1 . A sub-pixel, comprising:
a substrate; overhang pixel isolation structures (PIS); overhang structures, the overhang structures including an extension disposed past a sidewall of the overhang structures; separation PIS; a metal structure disposed over the substrate; an inorganic layer disposed over each overhang PIS and over each separation PIS, the inorganic layer including a plurality of openings; organic light-emitting diode (OLED) material disposed over the metal structure, wherein the OLED material is disposed between the inorganic layer under each extension of the overhang structures; and a cathode disposed over the OLED material.

2 . The sub-pixel of claim 1 , wherein adjacent overhang PIS have the metal structure disposed therebetween.

3 . The sub-pixel of claim 1 , wherein adjacent separation PIS have the metal structure disposed therebetween.

4 . The sub-pixel of claim 1 , wherein the inorganic layer comprises aluminum oxide (Al 2 O 3 ).

5 . The sub-pixel of claim 1 , wherein the overhang structures include a second structure disposed over a first structure.

6 . The sub-pixel of claim 1 , further comprising an encapsulation layer disposed over the cathode and past an endpoint of the cathode.

7 . The sub-pixel of claim 1 , wherein the plurality of openings comprise about 20 percent of the inorganic layer.

8 . The sub-pixel of claim 1 , wherein the plurality of openings extend through the inorganic layer to a top surface of the separation PIS or an upper surface of the overhang PIS.

9 . A sub-pixel, the sub-pixel comprising overhang structures disposed over a substrate including an extension disposed past a sidewall of the overhang structures, a metal structure disposed over the substrate, an inorganic layer disposed under each extension of the overhang structures, the inorganic layer including a plurality of openings, the sub-pixel is made by a process comprising:
depositing an organic light-emitting diode (OLED) material over the substrate, the OLED is disposed over the metal structure, wherein the inorganic layer under each extension of the overhang structures is disposed between the OLED material; and depositing a cathode, wherein the cathode is disposed under each extension of the overhang structures.

10 . The sub-pixel of claim 9 , wherein the inorganic layer is deposited using evaporation deposition.

11 . The sub-pixel of claim 9 , further including overhang pixel isolation structures (PIS) disposed under the overhang structures.

12 . The sub-pixel of claim 11 , wherein adjacent overhang PIS have the metal structure disposed therebetween.

13 . The sub-pixel of claim 9 , further including separation pixel isolation structures (PIS), adjacent separation PIS have the metal structure disposed therebetween.

14 . The sub-pixel of claim 9 , further comprising:
an encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the encapsulation layer extends under at least a portion of the extensions of overhang structures, along the sidewall of the overhang structures, and contacts a bottom surface of the extensions of the overhang structures.

15 . A method, comprising:
depositing an inorganic layer over a substrate, the substrate including a plurality of metal structures, a plurality of overhang pixel isolation structures (PIS) and a plurality of separation PIS; removing portions of the inorganic layer, such that the inorganic layer includes a plurality of openings, such that the inorganic layer is at least partially disposed over the plurality of overhang PIS, and such that the inorganic layer is at least partially disposed over a plurality of separation PIS; forming overhang structures over the inorganic layer disposed over a plurality of overhang PIS, the overhang structures including an extension disposed past a sidewall of the overhang structures; depositing an organic light-emitting diode (OLED) material over the substrate, the OLED material is disposed over the metal structures and the inorganic layer under each extension of the overhang structures; and depositing a cathode, wherein the cathode is disposed under each extension of the overhang structures.

16 . The method of claim 15 , further comprising:
depositing an encapsulation layer over the cathode and past an endpoint of the cathode, wherein the encapsulation layer extends under at least a portion of the extensions of overhang structures, along the sidewall of the overhang structures, and contacts a bottom surface of the extensions of the overhang structures.

17 . The method of claim 15 , wherein the plurality of openings extend through the inorganic layer to a top surface of the separation PIS or an upper surface of the overhang PIS.

18 . The method of claim 15 , wherein portions of the inorganic layer are removed by an etching process.

19 . The method of claim 15 , wherein the inorganic layer comprises aluminum oxide (Al 2 O 3 ).

20 . The method of claim 15 , the plurality of openings extend through the inorganic layer to a top surface of the separation PIS or an upper surface of the overhang PIS.

Assignees

• Applied Materials Inc

Inventors

• Lee Jungmin

Classifications

• H10K59/1201

  Manufacture or treatment · CPC title

• H10K59/122 Primary

  Pixel-defining structures or layers, e.g. banks · CPC title

• H10K59/873 Primary

  Encapsulations · CPC title