Methods of fabricating oled panel with inorganic pixel encapsulating barrier

Patent metadata

Field	Value
Publication number	US-2025234738-A1
Application number	US-202519098503-A
Country	US
Kind code	A1
Filing date	Apr 2, 2025
Priority date	Sep 4, 2020
Publication date	Jul 17, 2025
Grant date	—

Abstract

Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.

First claim

What is claimed is:

1 . A device, comprising:
a substrate; pixel-defining layer (PDL) structures disposed over the substrate; overhang structures disposed over an upper surface of the PDL structures, the overhang structures having an upper portion that extends past sidewalls of a lower portion disposed on PDL structures, adjacent overhang structures defining wells of sub-pixels of the device; and at least one sub-pixel comprising:
an anode;
a first layer including organic light-emitting material, the first layer disposed over the anode and on the upper surface of the PDL structures;
a second layer covering the first layer and contacting the upper surface of the PDL structures between the lower portion and an endpoint of the first layer; and
an encapsulation layer disposed over the second layer, wherein the encapsulation layer is disposed below the upper portion and contacts the sidewalls of the lower portion of the overhang structures.

2 . The device of claim 1 , further comprising one or more capping layers, the one or more capping layers are disposed between the second layer and the encapsulation layer.

3 . The device of claim 2 , wherein a first capping layer comprises an organic material and the encapsulation layer includes an inorganic material.

4 . The device of claim 1 , wherein the second layer includes a cathode material and the encapsulation layer includes an inorganic material.

5 . The device of claim 1 , wherein the encapsulation layer extends under at least a portion of the overhang structures past the second layer such that the encapsulation layer contacts sidewalls of the lower portion and contacts a bottom surface of the upper portion of the overhang structures.

6 . A device, comprising:
a substrate; pixel-defining layer (PDL) structures disposed over the substrate; overhang structures disposed over an upper surface of the PDL structures, the overhang structures having an upper portion that extends past sidewalls of a lower portion, adjacent overhang structures defining wells of sub-pixels of the device; and at least one sub-pixel comprising:
an anode disposed between adjacent PDL structures;
an organic light-emitting material disposed on the anode; and
a cathode disposed over the organic light-emitting material, contacting the sidewall of the lower portion, and contacting the upper surface of the PDL structures between the lower portion and an endpoint of the organic light-emitting material.

7 . The device of claim 6 , wherein portions of the anode are disposed under the adjacent PDL structures.

8 . The device of claim 6 , further comprising an encapsulation layer over the cathode, wherein the encapsulation layer extends under at least a portion of the overhang structures past the cathode such that the encapsulation layer contacts sidewalls of the lower portion and contacts a bottom surface of the upper portion of the overhang structures.

9 . The device of claim 6 , wherein:
the upper portion comprises a first inorganic material, wherein the first inorganic material is conductive or nonconductive; or the lower portion comprises a second inorganic material, wherein the second inorganic material is conductive or nonconductive.

10 . A device, comprising:
a substrate; pixel-defining layer (PDL) structures disposed over the substrate; inorganic overhang structures disposed over an upper surface of the PDL structures, the inorganic overhang structures having an upper portion disposed on an lower portion disposed on the upper surface of the PDL structures, the upper portion extends past sidewalls of the lower portion; and a first sub-pixel and a second sub-pixel, each of the first sub-pixel and the second sub-pixel comprising:
an anode between adjacent PDL structures;
an organic light-emitting material disposed over the anode;
a cathode disposed over the organic light-emitting material, extending under the inorganic overhang structures adjacent to each sub-pixel, contacting the upper surface of the PDL structures between the lower portion and an endpoint of the organic light-emitting material, and contacting a sidewall of the lower portion of the inorganic overhang structures; and
an encapsulation layer disposed over the cathode, wherein the encapsulation layer extends under at least a portion of the inorganic overhang structures past the cathode along the sidewall of the lower portion, and contacts a underside surface of the upper portion of the inorganic overhang structures.

11 . The device of claim 10 , further comprising one or more capping layers, the one or more capping layers are disposed between the cathode and the encapsulation layer.

12 . The device of claim 10 , wherein the encapsulation layer of the first sub-pixel is separated from the encapsulation layer of the second sub-pixel over the upper portion.

13 . The device of claim 12 , wherein an additional encapsulation layer is disposed over the encapsulation layer of the first sub-pixel and the encapsulation layer of the second sub-pixel, wherein the additional encapsulation layer is disposed between each encapsulation layer on the upper portion of the inorganic overhang structures.

14 . A device, comprising:
a substrate; pixel-defining layer (PDL) structures disposed over the substrate; overhang structures disposed over an upper surface of the PDL structures, the overhang structures having an upper portion that extends past sidewalls of a lower portion, adjacent overhang structures defining wells of sub-pixels of the device; and a first sub-pixel and a second sub-pixel, each of the first and second sub-pixel comprising:
an anode between adjacent PDL structures;
an organic light-emitting material disposed on the anode;
a cathode disposed on the organic light-emitting material and contacting the lower portion, wherein cathodes of the first sub-pixel and second sub-pixel are configured to emit different colors; and
an encapsulation layer disposed over the cathode, wherein the encapsulation layer is disposed below the upper portion, contacts the lower portion, and contacts an underside surface of the upper portion of the overhang structures, wherein encapsulation layers the first sub-pixel and the second sub-pixel are separated from each other.

15 . The device of claim 14 , wherein portions of the anode are disposed under the adjacent PDL structures.

16 . The device of claim 11 , further comprising one or more capping layers, the one or more capping layers are disposed between the cathode and the encapsulation layer.

17 . The device of claim 11 , wherein:
the upper portion comprises a first inorganic material, wherein the first inorganic material is conductive or nonconductive; or the lower portion comprises a second inorganic material, wherein the second inorganic material is conductive or nonconductive.

18 . A device, comprising:
a substrate; pixel-defining layer (PDL) structures disposed over the substrate; overhang structures disposed over an upper surface of the PDL structures, the overhang structures having an upper portion disposed on a lower portion, the upper portion having a bottom surface wider than a top surface of the lower portion, adjacent overhang structures defining wells of sub-pixels of the device; and a first sub-pixel and a second sub-pixel, each of the first and second sub-pixel comprising:
an anode;
an organic light-emitting material disposed over the anode;
a cathode disposed over the organic light-emitting material; and
an encapsulation layer disposed over the cathode

Assignees

• Applied Materials Inc

Inventors

• Choung Ji-Young
• Haas Dieter
• Lin Yu Hsin
• Lee Jungmin
• Yoo Seong Ho
• Kim Si Kyoung

Classifications

• H10K50/844 Primary

  Encapsulations · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K50/84

  Passivation; Containers; Encapsulations · CPC title

• H10K59/1315

  comprising structures specially adapted for lowering the resistance · CPC title

• H10K59/80522

  combined with auxiliary electrodes · CPC title