Templated photonic structures and resonators and methods of fabricating the same

Patent metadata

Field	Value
Publication number	US-2025224565-A1
Application number	US-202519016383-A
Country	US
Kind code	A1
Filing date	Jan 10, 2025
Priority date	Jan 10, 2024
Publication date	Jul 10, 2025
Grant date	—

Abstract

Methods of making optic structures (e.g., microring resonator, meta-elements) include imprinting a first surface of a moldable polymer having at least one inverse micro/nano-feature into a second surface of a first polymeric cladding layer disposed on a second substrate to form at least one trench micro/nano-feature contrapositive to the at least one inverse micro/nano-feature. A liquid polymeric precursor is applied into the at least one trench micro/nano-feature where it is solidified to form a solid polymer. A difference between a first refractive index of the first cladding layer and a second refractive index of the solid polymer is ≥about 0.05. The solid is heated for thermal reflow to define a meniscus followed by applying a second polymeric cladding layer thereon. Organic cladded (e.g., microring resonator) optic structures are also provided, which may have a quality (Q)-factor of ≥about 5×105 around 770 nm wavelength).

First claim

What is claimed is:

1 . A method of making a templated optical structure, the method comprising:
patterning a first surface of a moldable polymer disposed on a first substrate by contacting a rigid inverse mold having at least one trench microfeature with the first surface of the moldable polymer to define at least one inverse trench microfeature in the first surface; imprinting the first surface of the moldable polymer having the at least one inverse trench microfeature into a second surface of a first polymeric cladding layer disposed on a second substrate to replicate the at least one trench microfeature contrapositive to the at least one inverse trench microfeature in the second surface, wherein the first polymeric cladding layer has a first refractive index; applying a liquid polymeric precursor into the at least one trench microfeature on the second surface of the first polymeric cladding layer and solidifying the liquid polymeric precursor to form a solid polymer having a second refractive index, wherein a difference between the first refractive index and the second refractive index is greater than or equal to about 0.05; and heating the solid polymer to facilitate retraction from regions of the second surface external to the at least one trench microfeature and annealing for thermal reflow of the solid polymer in the at least one trench microfeature, wherein the solid polymer disposed in the at least one trench microfeature defines an optic feature embedded in the first polymeric cladding layer.

2 . The method of claim 1 , further comprising applying a second polymeric cladding layer over the solid polymer in the at least one trench microfeature in the second surface of the first polymeric cladding layer, wherein the solid polymer disposed in the at least one trench microfeature defines the optic feature embedded in the first polymeric cladding layer and the second polymeric cladding layer.

3 . The method of claim 2 , wherein the moldable polymer comprises polyurethaneacrylate (PUA) and the first polymeric cladding and the second polymeric cladding respectively comprise polyurethaneacrylate (PUA).

4 . The method of claim 2 , wherein the second polymeric cladding layer is formed from:
(i) a liquid comprising an ultraviolet radiation (UV)-curable polymer precursor and the applying the second polymeric cladding layer over the solid polymer in the at least one trench microfeature in the second surface of the first polymeric cladding layer further comprises applying ultraviolet (UV) radiation to cure the liquid to form a solid second polymeric cladding layer; (ii) a liquid comprising a thermoset polymer precursor and the applying the second polymeric cladding layer over the solid polymer in the at least one trench microfeature in the second surface of the first polymeric cladding layer further comprises applying heat to cure the liquid to form a solid second polymeric cladding layer; (iii) a liquid comprising a thermoplastic polymer and the applying the second polymeric cladding layer over the solid polymer in the at least one trench microfeature in the second surface of the first polymeric cladding layer further comprises applying heat or solvent evaporation to form a solid second polymeric cladding layer; or (iv) a liquid comprising cross-linked molecules that after solidification forms an aerogel material having a porous network of the cross-linked molecules.

5 . The method of claim 1 , wherein the liquid polymeric precursor comprises of one or more polymer precursors dissolved in a solution.

6 . The method of claim 1 , wherein the applying the liquid polymeric precursor into the at least one trench comprises:
(i) spin casting the liquid polymeric precursor into the at least one trench on the surface of the first polymeric cladding layer; or (ii) printing the liquid polymeric precursor in a printing process selected from the group consisting of: ink-jet printing, aerosol jet printing, electrohydrodynamic printing, photoacoustic printing, and combinations thereof.

7 . The method of claim 6 , wherein the applying comprises (i) the spin casting that further comprises at least two spin casting steps of the liquid polymeric precursor to form at least two layers in the at least one trench on the surface of the first polymeric cladding layer.

8 . The method of claim 1 , wherein the regions of the second surface external to the at least one trench microfeature are substantially free of any solid polymer.

9 . The method of claim 1 , wherein the moldable polymer is:
(i) a liquid comprising an ultraviolet radiation (UV)-curable polymer precursor and the patterning of the first surface of the moldable polymer further comprises applying ultraviolet (UV) radiation to cure the liquid to form a solid moldable polymer during the contacting with the rigid inverse mold; (ii) a liquid comprising a thermosetting polymer precursor and the patterning of the first surface of the moldable polymer further comprises applying thermal energy to cure the liquid to form a solid moldable polymer during the contacting with the rigid inverse mold; or (iii) a thermoplastic polymer and the patterning of the first surface of the moldable polymer further comprises applying heat and pressure to form a solid moldable polymer during the contacting with the rigid inverse mold.

10 . The method of claim 1 , wherein the first polymeric cladding layer is formed from:
(i) a liquid comprising an ultraviolet radiation (UV)-curable polymer precursor and the imprinting further comprises applying ultraviolet (UV) radiation to cure the liquid to a solid to form the first polymeric cladding layer having the at least one trench microfeature in the second surface; (ii) a liquid comprising a thermoset polymer precursor and the imprinting further comprises applying pressure and heat to cure the liquid to form the solid first polymeric cladding layer having the at least one trench microfeature in the second surface; or (iii) a liquid comprising a thermoplastic polymer and the imprinting further comprises applying pressure and heat to form the solid first polymeric cladding layer having the at least one trench microfeature in the second surface.

11 . The method of claim 1 , wherein the solid polymer is selected from the group consisting of: polystyrene (PS), polycarbonate (PC), polymethylmethacrylate (PMMA), epoxy-based resin, silsesquioxane resin, electrooptic polymers, thermooptic polymers, photothermal polymers, photoelastic polymers, a polymer comprising dyes or quantum dots, a composite comprising a plurality of nanoparticles distributed in a polymer, and combinations thereof.

12 . The method of claim 1 , wherein the solid polymer comprises polystyrene (PS).

13 . The method of claim 1 , where the second substrate comprises a flexible polymer.

14 . The method of claim 1 , wherein after the heating, the second surface of the first polymeric cladding layer is free of any residual solid polymer having the second refractive index without any removal processes.

15 . The method of claim 1 , further comprising removing the first polymeric cladding layer after heating the solid polymer.

16 . A method of making an organic microring resonator optic structure, the method comprising:
patterning a first surface of a moldable polymer disposed on a first substrate by contacting a rigid inverse mold having at least one trench microfeature with the first surface of the moldable polymer to define at least one inverse trench microfeature in the first surface; imprinting the first surface of the moldable polymer having the a

Assignees

• Univ Michigan Regents

Inventors

• Lin Wei-Kuan
• Guo Lingjie Jay

Classifications

• G02B6/1221

  made from organic materials · CPC title

• G02B6/138

  by using polymerisation · CPC title

• G02B6/29341 Primary

  Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder (evanescent coupling for sensing fluorescence G01N21/648) · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title