Leveling agent, composition, and application thereof

Patent metadata

Field	Value
Publication number	US-2025215598-A1
Application number	US-202519066147-A
Country	US
Kind code	A1
Filing date	Feb 27, 2025
Priority date	Aug 31, 2022
Publication date	Jul 3, 2025
Grant date	—

Abstract

An embodiment of the present disclosure provides a leveling agent, which is specifically a polypyridine compound, where the polypyridine compound includes a structural unit shown in Formula (I) or a protonated product of the structural unit shown in Formula (I):In Formula (I), R1 and R2 are independently any one of the following: substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, alkylene containing an ether oxygen atom, ester, and/or imide, arylene containing an ether oxygen atom, ester, and/or imide, arylene alkyl containing an ether oxygen atom, ester, and/or imide, and alkylene aryl containing an ether oxygen atom, ester, and/or imide; and R3 is any one of groups such as a single bond, substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, and substituted or unsubstituted alkylene aryl.

First claim

What is claimed is:

1 . A leveling agent, wherein the leveling agent is a polypyridine compound, and the polypyridine compound comprises a structural unit shown in Formula (I) or a protonated product of the structural unit shown in Formula (I):

wherein in Formula (I), R 1 and R 2 are independently any one of the following: substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, alkylene containing an ether oxygen atom, ester, and/or imide, arylene containing an ether oxygen atom, ester, and/or imide, arylene alkyl containing an ether oxygen atom, ester, and/or imide, or alkylene aryl containing an ether oxygen atom, ester, and/or imide; and R 3 is any one of the following: a single bond, substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, and a linking group containing an ether oxygen atom, ester, and/or imide.

2 . The leveling agent according to claim 1 , wherein the polypyridine compound comprises a protonated product and a halide ion of the structural unit shown in Formula (I), and the halide ion comprises any one of the following: a fluoride ion, a chloride ion, a bromide ion, and an iodide ion.

3 . The leveling agent according to claim 1 , wherein in R 1 , R 2 , and R 3 , a quantity of carbon atoms in the substituted or unsubstituted alkylene ranges from 1 to 30, and a quantity of carbon atoms in the substituted or unsubstituted arylene ranges from 6 to 30.

4 . The leveling agent according to claim 1 , wherein the alkylene containing an ether oxygen atom is denoted as —(R 4 O) x -L-(R 5 O) y —R 5 —, wherein R 4 and R 5 are same or different alkylene, x is an integer greater than or equal to 0, y is an integer greater than or equal to 1, and L represents a single bond or at least one ether oxygen block.

5 . A composition, wherein the composition comprises a metal ion source, and a leveling agent, wherein the leveling agent is a polypyridine compound, and the polypyridine compound comprises a structural unit shown in Formula (I) or a protonated product of the structural unit shown in Formula (I):

wherein in Formula (I), R 1 and R 2 are independently any one of the following:
substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, alkylene containing an ether oxygen atom, ester, and/or imide, arylene containing an ether oxygen atom, ester, and/or imide, arylene alkyl containing an ether oxygen atom, ester, and/or imide, or alkylene aryl containing an ether oxygen atom, ester, and/or imide; and R 3 is any one of the following: a single bond, substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, and a linking group containing an ether oxygen atom, ester, and/or imide.

6 . The composition according to claim 5 , wherein in the electroplating composition, a concentration of the leveling agent ranges from 1 ppm to 100 ppm.

7 . The composition according to claim 5 , wherein the electroplating composition further comprises one or more of the following: an accelerator, an inhibitor, or an inorganic additive.

8 . The composition according to claim 7 , wherein the accelerator comprises one or more of the following: 3-mercapto-1-propane sulfonate, sodium polydithiodipropane sulfonate, or N,N-dimethyl-dithiocarboxamidopropanesulfonate sodium; and a concentration of the accelerator in the composition ranges from 1 ppm to 50 ppm.

9 . The composition according to claim 7 , wherein the inhibitor comprises one or more of the following: polyethylene glycol, polypropylene glycol, a block copolymer PEO-PPO-PEO, a block copolymer PPO-PEO-PPO, a random copolymer of EO and PO, or a propylene glycol block polyether; and the concentration of the inhibitor in the composition ranges from 1 ppm to 2000 ppm.

10 . The composition according to claim 7 , wherein the inorganic additive comprises chloride ions, and a concentration of the chloride ions in the composition ranges from 1 ppm to 100 ppm.

11 . The composition according to claim 5 , wherein the composition further comprises at least one acid, and the at least one acid comprises sulphuric acid and/or methyl sulfonate.

12 . The composition according to claim 11 , wherein a concentration of the at least one acid in the composition ranges from 1 g/L to 100 g/L.

13 . The composition according to claim 5 , wherein the metal ion source comprises any one of the following: a copper ion source, a nickel ion source, a tin ion source, a cobalt ion source, a ruthenium ion source, or a silver ion source.

14 . The composition according to claim 13 , wherein the copper ion source comprises copper sulfate pentahydrate and/or copper methyl sulfonate; and a concentration of the copper ion source in the composition ranges from 1 g/L to 100 g/L in terms of copper ions.

15 . An electronic apparatus, wherein the electronic apparatus uses a electronic substrate, wherein the electronic substrate comprises a base layer and a metal layer disposed on the base layer, wherein the metal layer is formed by electroplating a composition, wherein the composition comprises a metal ion source, and a leveling agent, wherein the leveling agent is a polypyridine compound, and the polypyridine compound comprises a structural unit shown in Formula (I) or a protonated product of the structural unit shown in Formula (I):

wherein in Formula (I), R 1 and R 2 are independently any one of the following: substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, alkylene containing an ether oxygen atom, ester, and/or imide, arylene containing an ether oxygen atom, ester, and/or imide, arylene alkyl containing an ether oxygen atom, ester, and/or imide, or alkylene aryl containing an ether oxygen atom, ester, and/or imide; and R 3 is any one of the following: a single bond, substituted or unsubstituted alkylene, substituted or unsubstituted arylene, substituted or unsubstituted arylene alkyl, substituted or unsubstituted alkylene aryl, and a linking group containing an ether oxygen atom, ester, and/or imide.

16 . The electronic apparatus according to claim 15 , wherein the metal layer comprises any one of the following: copper or a copper alloy layer, nickel or a nickel alloy layer, tin or a tin alloy layer, cobalt or a cobalt alloy layer, ruthenium or a ruthenium alloy layer, or silver or a silver alloy layer.

17 . The electronic apparatus according to claim 15 , wherein the polypyridine compound comprises a protonated product and a halide ion of the structural unit shown in Formula (I), and the halide ion comprises any one of the following: a fluoride ion, a chloride ion, a bromide ion, and an iodide ion.

18 . The electronic apparatus according to claim 15 , wherein in R 1 , R 2 , and R 3 , a quantity of carbon atoms in the substituted or unsubstituted alkylene ranges from 1 to

Assignees

• Huawei Tech Co Ltd
• Univ Fudan

Inventors

• Liu Xinyu
• Xiao Fei
• Cheng Yuanrong
• Lu Guanbin
• Han Shuo
• Chen Junye

Classifications

• C08G73/0627

  with only one nitrogen atom in the ring · CPC title

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C25D5/18

  Electroplating using modulated, pulsed or reversing current · CPC title

• C25D3/64

  containing more than 50% by weight of silver · CPC title

• C25D3/60

  containing more than 50% by weight of tin · CPC title