Particle removal system and method of controlling particle removal system

Patent metadata

Field	Value
Publication number	US-2025205756-A1
Application number	US-202318395838-A
Country	US
Kind code	A1
Filing date	Dec 26, 2023
Priority date	Dec 26, 2023
Publication date	Jun 26, 2025
Grant date	—

Abstract

A particle removal system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles. The particle removal system includes a charger a robot, and a controller. The controller is configured to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger.

First claim

What is claimed is:

1 . A particle removal system comprising:
a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge; a robot including a hand configured to hold the particle absorption tool; and a controller configured to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger.

2 . The particle removal system according to claim 1 , wherein
the charger includes a voltage applier configured to contact the particle absorption tool and to apply a voltage to the particle absorption tool; and the controller is configured to control operation of the robot to bring the voltage applier of the charger into contact with the particle absorption tool to electrostatically charge the particle absorption tool so as to build up the static electric charge.

3 . The particle removal system according to claim 2 , wherein
the robot is arranged in a substrate conveyor; the hand is configured to hold a substrate and the particle absorption tool, which has a disk shape similar to the substrate, in the substrate conveyor; and the controller is configured to control operation of the robot to bring the voltage applier into contact with the disk-shaped particle absorption tool being held by the hand in the substrate conveyor to electrostatically charge the particle absorption tool so as to build up the static electric charge, and to absorb particles in at least one of an interior of the substrate conveyor and an interior of a substrate processor by using the particle absorption tool.

4 . The particle removal system according to claim 2 , wherein the voltage applier is included in the robot.

5 . The particle removal system according to claim 4 , wherein
the robot includes a robot arm having an distal end part to which the hand is attached; the voltage applier is arranged in the distal end of the robot arm, and is configured to contact the particle absorption tool being held by the hand; and the controller is configured to bring the voltage applier, which is arranged in the distal end of the robot arm, into contact with the particle absorption tool being held by the hand to electrostatically charge the particle absorption tool so as to build up the static electric charge.

6 . The particle removal system according to claim 5 , wherein
the robot includes a mover configured to move the voltage applier; and the controller is configured to move the voltage applier by using the mover so as to bring the voltage applier into contact with the particle absorption tool being held by the hand.

7 . The particle removal system according to claim 3 , wherein the voltage applier is configured to contact a contact part that is arranged on a peripheral part of the disk-shaped particle absorption tool so as to apply the voltage to the particle absorption tool.

8 . The particle removal system according to claim 7 further comprising a position adjuster configured to adjust a position of the substrate and the disk-shaped particle absorption tool, wherein
the controller is configured to direct the hand to hold the particle absorption tool whose position is being adjusted by the position adjuster, and to bring the voltage applier into contact with the contact part of the disk-shaped particle absorption tool being held by the hand with the position of the particle absorption tool being adjusted so as to apply the voltage to the particle absorption tool.

9 . The particle removal system according to claim 3 further comprising a container attached to the substrate conveyor, and previously accommodating the particle absorption tool, wherein
the controller is configured to direct the hand to hold the particle absorption tool, which is previously accommodated in the container, and to then bring the voltage applier into contact with the particle absorption tool held by the hand to electrostatically charge the particle absorption tool so as to build up the static electric charge.

10 . The particle removal system according to claim 1 further comprising a detector configured to detect a degree of particle absorption by the particle absorption tool.

11 . The particle removal system according to claim 10 , wherein the detector includes at least one of a charge-amount detector configured to detect a charge amount of the particle absorption tool, and an image capturer configured to capture an image of the particles that are absorbed by the particle absorption tool.

12 . The particle removal system according to claim 10 , wherein
the robot includes a robot arm having a distal end part to which the hand is attached; and the detector is arranged in the distal end of the robot arm, and is configured to detect the degree of particle absorption by the particle absorption tool being held by the hand.

13 . The particle removal system according to claim 1 further comprising a cleaner configured to clean the particle absorption tool, wherein
the controller is configured to, after absorbing particles by using the particle absorption tool, to move the hand so as to move the particle absorption tool to the cleaner.

14 . The particle removal system according to claim 9 , wherein
the container previously accommodates a plurality of particle absorption tools as the particle absorption tool; and the controller is configured to sequentially change the plurality of particle absorption tools from one after another so as to absorb particles in at least one of the interior of the substrate conveyor and the interior of the substrate processor.

15 . A method for controlling a particle removal system comprising:
holding a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles by using a hand included in a robot; electrostatically charging the particle absorption tool so as to build up the static electric charge by using a charger by operating the robot; and absorbing the particles by using the particle absorption tool building up the static electric charge.

Assignees

• Kawasaki Heavy Ind Ltd
• Kawasaki Robotics Usa Inc

Inventors

• Tan Haruhiko
• Shimomura Nobuyasu
• PHILLIBER Theodore
• Le Ryan
• BHARWANI Avish Ashok
• Jeyapalan Simon

Classifications

• B08B1/50

  involving cleaning of the cleaning members · CPC title

• B08B1/14

  Wipes; Absorbent members, e.g. swabs or sponges (with integrated means for dispensing fluids B08B1/40) · CPC title

• B25J15/0014

  having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title

• B08B6/00 Primary

  Cleaning by electrostatic means · CPC title