Trench overhang for si-ap

Patent metadata

Field	Value
Publication number	US-2025204201-A1
Application number	US-202418972076-A
Country	US
Kind code	A1
Filing date	Dec 6, 2024
Priority date	Dec 8, 2023
Publication date	Jun 19, 2025
Grant date	—

Abstract

In one or more embodiments, a sub-pixel circuit includes a first sub-pixel and a second sub-pixel. Each of the sub-pixels includes an anode structure. The anode structure includes an overhang defined by an extension of an upper portion of a sidewall of the anode structure extending past a lower portion of the sidewall of the anode structure. Each of the sub-pixels includes an organic light-emitting diode (OLED) material on an uppermost surface of the anode structure, a cathode disposed over the OLED material disposed on the anode structure, and an encapsulation layer disposed over the cathode. The sub-pixel circuit further includes a well disposed between and defined by adjacent anode structures of the first sub-pixel and the second sub-pixel. The encapsulation layer separates the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

First claim

What is claimed is:

1 . A sub-pixel circuit, comprising:
a first sub-pixel and a second sub-pixel, each of the first sub-pixel and the second sub-pixel comprise:
an anode structure, the anode structure having an overhang defined by an extension of an upper portion of a sidewall of the anode structure extending past a lower portion of the sidewall of the anode structure;
an organic light-emitting diode (OLED) material on an uppermost surface of the anode structure;
a cathode disposed over the OLED material disposed on the anode structure; and
an encapsulation layer disposed over the cathode; and
a well disposed between the first sub-pixel and the second sub-pixel defined by adjacent anode structures of the first sub-pixel and the second sub-pixel, wherein the encapsulation layer separates the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

2 . The sub-pixel circuit of claim 1 , wherein the anode structure comprises a metal-containing material.

3 . The sub-pixel circuit of claim 2 , wherein the metal-containing material comprises a transparent conductive oxide (TCO), copper, titanium, aluminum, molybdenum, silver, chromium, or combinations thereof.

4 . The sub-pixel circuit of claim 3 , wherein the TCO material includes indium zinc oxide (IZO), indium tin oxide (ITO), indium gallium zinc oxide (IGZO), or combinations thereof.

5 . The sub-pixel circuit of claim 1 , wherein the anode structure comprises a first layer and a second layer, the second layer is disposed on the first layer.

6 . The sub-pixel circuit of claim 5 , wherein the first layer and the second layer include different compositions.

7 . The sub-pixel circuit of claim 1 , wherein the encapsulation layer directly contacts the sidewall of the anode structure to separate the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

8 . The sub-pixel circuit of claim 1 , wherein the encapsulation layer directly contacts a passivation layer disposed on the sidewall of the anode structure to separate the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

9 . The sub-pixel circuit of claim 1 , wherein a passivation layer is disposed on the uppermost surface of the anode structure and the upper portion of the sidewall.

10 . A sub-pixel circuit, comprising:
a first sub-pixel and a second sub-pixel, each of the first sub-pixel and the second sub-pixel comprise:
an anode structure having two or more layers having different compositions, the anode structure having an overhang defined by an extension of an upper portion of a sidewall of the anode structure extending past a lower portion of the sidewall of the anode structure;
an organic light-emitting diode (OLED) material on an uppermost surface of the anode structure;
a cathode disposed over the OLED material disposed on the anode structure; and
an encapsulation layer disposed over the cathode; and
a well disposed between the first sub-pixel and the second sub-pixel defined by adjacent anode structures of the first sub-pixel and the second sub-pixel, wherein the encapsulation layer separates the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

11 . The sub-pixel circuit of claim 10 , wherein the anode structure comprises a metal-containing material.

12 . The sub-pixel circuit of claim 11 , wherein the metal-containing material comprises a transparent conductive oxide (TCO), copper, titanium, aluminum, molybdenum, silver, chromium, or combinations thereof.

13 . The sub-pixel circuit of claim 12 , wherein the TCO material includes indium zinc oxide (IZO), indium tin oxide (ITO), indium gallium zinc oxide (IGZO), or combinations thereof.

14 . The sub-pixel circuit of claim 10 , wherein the encapsulation layer directly contacts the sidewall of the anode structure to separate the OLED material and the cathode over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

15 . The sub-pixel circuit of claim 10 , wherein the encapsulation layer directly contacts a passivation layer disposed on the sidewall of the anode structure to separate the OLED material and the cathode disposed over the uppermost surface of the anode structure from the OLED material and the cathode disposed in the well.

16 . The sub-pixel circuit of claim 10 , wherein a passivation layer is disposed on the uppermost surface of the anode structure and the upper portion of the sidewall.

17 . The sub-pixel circuit of claim 10 , wherein the OLED material of the first sub-pixel emits a light of a first color when energized and the second sub-pixel emits a light of a second color when energized.

18 . A method, comprising:
forming at least two anode structures, each anode structure having an overhang defined by an extension of an upper portion of a sidewall of each anode structure extending past a lower portion of the sidewall of each anode structure; depositing an organic light-emitting diode (OLED) material and a cathode corresponding to a first sub-pixel; and depositing an encapsulation layer, the encapsulation layer separating the OLED material and the cathode deposited over an uppermost surface of each anode structure from the OLED material and the cathode disposed in a well defined by adjacent anode structures of the first sub-pixel and a second sub-pixel.

19 . The method of claim 18 , wherein the anode structures comprise a metal-containing material.

20 . The method of claim 19 , wherein the metal-containing material comprises a transparent conductive oxide (TCO), copper, titanium, aluminum, molybdenum, silver, chromium, or combinations thereof, wherein the TCO material includes, but is not limited to, indium zinc oxide (IZO), indium tin oxide (ITO), indium gallium zinc oxide (IGZO), or combinations thereof.

Assignees

• Applied Materials Inc

Inventors

• Haas Dieter
• Lee Jungmin

Classifications

• H10K59/35

  comprising red-green-blue [RGB] subpixels · CPC title

• H10K59/873

  Encapsulations · CPC title

• H10K59/80515 Primary

  characterised by their shape · CPC title

• H10K59/122

  Pixel-defining structures or layers, e.g. banks · CPC title

• H10K2102/101

  comprising transparent conductive oxides [TCO] · CPC title