Rare earth rotary target and preparation method therefor

Patent metadata

Field	Value
Publication number	US-2025188593-A1
Application number	US-202519057033-A
Country	US
Kind code	A1
Filing date	Feb 19, 2025
Priority date	Sep 7, 2022
Publication date	Jun 12, 2025
Grant date	—

Abstract

Disclosed are a rare earth rotary target and a preparation method therefor. The rare earth rotary target includes a back tube and at least one rare earth target tube welded outside of the back tube; and the back tube and the rare earth target tube are welded via an intermediate welding layer. The intermediate welding layer includes a metal indium solder and an aluminum sheet arranged in the metal indium solder. The aluminum content in the intermediate welding layer is 3-10 wt. %. The back tube, the aluminum sheet, and the rare earth target tube are concentric cylindrical structures. According to the technical solution of the present application, the melting point of the solder is increased, thus achieving the purpose of improving the sputtering power density and a target utilization rate of rare earth rotary targets.

First claim

What is claimed is:

1 . A rare earth rotary target, comprising a back tube and at least one rare earth target tube welded outside of the back tube;
wherein the back tube and the rare earth target tube are welded via an intermediate welding layer; the intermediate welding layer comprises a metal indium solder and an aluminum sheet arranged in the metal indium solder; the aluminum content in the intermediate welding layer is 3-10 wt. %; and the back tube, the aluminum sheet, and the rare earth target tube are concentric cylindrical structures.

2 . The rare earth rotary target according to claim 1 , wherein the rare earth target tube comprises any one of the rotary target tubes of lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, yttrium, and scandium.

3 . The rare earth rotary target according to claim 1 , wherein an individual aluminum sheet has a thickness of 0.05-0.15 mm.

4 . A preparation method for the rare earth rotary target according to claim 1 , comprising the following steps:
filling a metal indium solder between the back tube and the rare earth target tube at a preset welding temperature, and placing the aluminum sheet in the metal indium solder; or placing the aluminum sheet in the metal indium solder in advance, filling the metal indium solder with the placed aluminum sheet between the back tube and the rare earth target tube, and welding the back tube and the rare earth target tube to obtain a welded rare earth rotary target; subjecting the welded rare earth rotary target to a thermal treatment; and cooling the thermal-treated rare earth rotary target to room temperature and cleaning the same.

5 . The preparation method according to claim 4 , further comprising:
pre-coating the aluminum sheet with a layer of metal indium solder prior to filling.

6 . The preparation method according to claim 4 , wherein the preset welding temperature is 190-230° C.

7 . The preparation method according to claim 4 , wherein the thermal treatment comprises the following steps:
cooling the welded rare earth rotary target to room temperature and then cleaning the same; placing the cleaned rare earth rotary target in a vacuum thermal treatment furnace, and vacuum pumping to less than 10 −3 Pa; and performing a direct thermal treatment on the rare earth rotary target or performing a thermal treatment after charging an inert gas, wherein the thermal treatment temperature is 140° C.-640° C., and the thermal treatment time is 0.5-50 h.

8 . The preparation method according to claim 7 , wherein the thermal treatment is a step-wised insulation treatment, comprising:
a thermal treatment at 140° C. for 0.5-1 h; a thermal treatment at 157° C. for 1-3 h; a thermal treatment at 200° C. for 1-3 h; a thermal treatment at 250° C. for 1-3 h; a thermal treatment at 300° C. for 1-3 h; a thermal treatment at 350° C. for 1-5 h; a thermal treatment at 400° C. for 1-5 h; a thermal treatment at 450° C. for 1-5 h; a thermal treatment at 500° C. for 1-5 h; a thermal treatment at 550° C. for 1-5 h; a thermal treatment at 600° C. for 1-5 h; and a thermal treatment at 630° C. for 1-6 h.

Assignees

• Grirem Advanced Mat Co Ltd
• Grirem Hi Tech Co Ltd

Inventors

• Chen Dehong
• Wang Zhiqiang
• Zhong Jiamin
• Li Zongan
• Yang Hongbo
• Zhang Xiaowei
• Wu Daogao
• Pang Siming
• Zhang Yanling
• Cheng Jun
• Wang Shuang
• Xu Minglei
• Yang Bingzheng
• Zhang Xiaoqiang

Classifications

• C23C14/3414 Primary

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• B23K31/02 Primary

  relating to soldering or welding · CPC title

• B23K2103/166

  Multilayered materials · CPC title

• B23K2103/10

  Aluminium or alloys thereof · CPC title

• B23K2101/06

  Tubes · CPC title