Profile display device, laser device, and electronic device manufacturing method

Patent metadata

Field	Value
Publication number	US-2025155819-A1
Application number	US-202418913610-A
Country	US
Kind code	A1
Filing date	Oct 11, 2024
Priority date	Nov 15, 2023
Publication date	May 15, 2025
Grant date	—

Abstract

A profile display device includes an interface configured to receive a beam profile of laser light, a processor configured to generate a shifted outline by shifting a position of an outline of the beam profile in accordance with deviation of a light intensity distribution in the beam profile, and a display configured to display the beam profile and the shifted outline.

First claim

What is claimed is:

1 . A profile display device comprising:
an interface configured to receive a beam profile of laser light; a processor configured to generate a shifted outline by shifting a position of an outline of the beam profile in accordance with deviation of a light intensity distribution in the beam profile; and a display configured to display the beam profile and the shifted outline.

2 . The profile display device according to claim 1 ,
wherein the processor generates the shifted outline at regular intervals based on the beam profile newly received via the interface, and the display updates display of the beam profile and the shifted outline every time the processor generates the shifted outline.

3 . The profile display device according to claim 1 ,
wherein the outline has a rectangular shape.

4 . The profile display device according to claim 1 ,
wherein the processor generates the outline so as to surround a portion of the beam profile having a light intensity equal to or higher than a threshold value.

5 . The profile display device according to claim 1 ,
wherein the processor generates the outline by performing edge detection on the beam profile.

6 . The profile display device according to claim 1 ,
wherein the processor generates the shifted outline by shifting the position of the outline in accordance with a shift of a centroid of the beam profile with respect to a center of the outline.

7 . The profile display device according to claim 6 ,
wherein the center is a centroid of a figure defined by the outline.

8 . The profile display device according to claim 6 ,
wherein the processor calculates a position of the centroid (Gx, Gy) by following expressions,
Gx =Σ( I ( X,Y )× X )/Σ( I ( X,Y ))

Gy =Σ( I ( X,Y )× Y )/Σ( I ( X,Y ))

where I(X,Y) is a light intensity at a point (X,Y) in the beam profile.

9 . The profile display device according to claim 8 ,
wherein the processor calculates a position of the center Cx in a first direction from a distribution of a light intensity I(Gy) along a straight line in the first direction passing through the position of the centroid (Gx, Gy), and calculates a position of the center Cy in a second direction from a distribution of a light intensity I(Gx) along a straight line in the second direction passing through the position the centroid of (Gx, Gy) and intersecting the first direction.

10 . The profile display device according to claim 1 ,
wherein the processor determines whether or not the deviation of the light intensity distribution is within an allowable range, and the display displays information indicating whether or not the deviation of the light intensity distribution is within the allowable range in accordance with the determination by the processor.

11 . The profile display device according to claim 1 ,
wherein the display further displays the outline.

12 . The profile display device according to claim 11 ,
wherein the display displays the outline and the shifted outline in different display formats.

13 . The profile display device according to claim 11 ,
wherein the outline and the shifted outline have the same shape and the same size.

14 . A laser device comprising:
a laser oscillator configured to output laser light; a beam profiler configured to acquire a beam profile of the laser light; a processor configured to generate a shifted outline by shifting a position of an outline of the beam profile in accordance with deviation of a light intensity distribution in the beam profile; and a display configured to display the beam profile and the shifted outline.

15 . The laser device according to claim 14 , further comprising:
a slit arranged on an optical path of the laser light output from the laser oscillator.

16 . The laser device according to claim 14 , further comprising:
an optical axis adjustment mechanism configured to be capable of adjusting a posture of an optical element included in the laser oscillator, wherein the display updates display of the shifted outline when the beam profile is changed with operation of the optical axis adjustment mechanism.

17 . The laser device according to claim 16 ,
wherein the laser oscillator includes a laser chamber accommodating a laser gas and a pair of discharge electrodes arranged in the laser chamber, and the outline has a rectangular shape, and a direction of a long side of the rectangular shape corresponds to a direction of discharge caused by the discharge electrodes.

18 . The laser device according to claim 16 ,
wherein the optical axis adjustment mechanism is capable of adjusting the posture of the optical element in parallel with outputting of a plurality of pulses of the laser light by the laser oscillator.

19 . The laser device according to claim 16 ,
wherein the processor determines whether or not the deviation of the light intensity distribution is within an allowable range, and the display displays information indicating whether or not the deviation of the light intensity distribution is within the allowable range in accordance with the determination by the processor.

20 . An electronic device manufacturing method, comprising:
generating laser light using a laser device; outputting the laser light to an exposure apparatus; and exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device, the laser device including: a laser oscillator configured to output the laser light; a beam profiler configured to acquire a beam profile of the laser light; a processor configured to generate a shifted outline by shifting a position of an outline of the beam profile in accordance with deviation of a light intensity distribution in the beam profile; and a display configured to display the beam profile and the shifted outline.

Assignees

• Gigaphoton Inc

Inventors

• Igarashi Yutaka
• Marumo Akihiko

Classifications

• G06T11/23

  using straight lines or curves · CPC title

• G03F7/70191

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• G03F7/70175

  Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source · CPC title

• G03F7/70158

  Diffractive optical elements · CPC title

• G03F7/7015

  Details of optical elements · CPC title