Bolometer and bolometer array

Patent metadata

Field	Value
Publication number	US-2025155293-A1
Application number	US-202418939926-A
Country	US
Kind code	A1
Filing date	Nov 7, 2024
Priority date	Nov 15, 2023
Publication date	May 15, 2025
Grant date	—

Abstract

A bolometer includes a first electrode, a second electrode sandwiching a meandering interelectrode region with the first electrode, and a sensor portion including a carbon nanotube film that is electrically connected to the first electrode and the second electrode and is provided in the interelectrode region.

First claim

What is claimed is:

1 . A bolometer comprising:
a first electrode; a second electrode sandwiching a meandering interelectrode region with the first electrode; and a sensor portion including a carbon nanotube film that is electrically connected to the first electrode and the second electrode and is provided in the interelectrode region.

2 . The bolometer according to claim 1 ,
wherein the first electrode includes a first base end extending in a first direction and a plurality of first extension portions protruding from the first base end in a second direction intersecting the first direction, wherein the second electrode includes a second base end extending in the first direction and a plurality of second extension portions protruding from the second base end in the second direction between the first extension portions, and wherein the carbon nanotube film is electrically connected to the plurality of first extension portions and the plurality of second extension portions in at least a plurality of gap regions between the plurality of first extension portions and the plurality of second extensions.

3 . The bolometer according to claim 1 ,
wherein the sensor portion further includes a light receiving portion covering a surface side of a region including the carbon nanotube film, the first electrode, and the second electrode; and a connection portion extending from the light receiving portion to the carbon nanotube film.

4 . The bolometer according to claim 1 , wherein the carbon nanotube film has: a first film side surface extending along the interelectrode region and contacting with the first electrode; and a second film side surface extending along the interelectrode region and contacting with the second electrode.

5 . The bolometer according to claim 1 , wherein the carbon nanotube film extends in the interelectrode region and has a meandering shape.

6 . The bolometer according to claim 1 , wherein the carbon nanotube film includes a carbon nanotube network film.

7 . The bolometer according to claim 6 , wherein a width of the interelectrode region is 500 nm or more and 3 μor less.

8 . The bolometer according to claim 1 , further comprising a wiring portion,
wherein the wiring portion includes a first contact portion provided on a side of the second electrode, first wiring connecting the first electrode and the first contact portion, a second contact portion provided on a side of the first electrode, and second wiring connecting the second electrode and the second contact portion.

9 . The bolometer according to claim 8 , wherein the wiring portion supports the first electrode, the second electrode, and the carbon nanotube film.

10 . A bolometer array comprising:
the bolometer according to claim 1 , the bolometer including a plurality of bolometers; and a substrate on which the plurality of bolometers are provided side by side.

Assignees

• Nec Corp

Inventors

• Tanaka Tomo
• Sano Masahiko
• Noguchi Masataka
• Miyazaki Takashi

Classifications

• G01J2005/103

  Absorbing heated plate or film and temperature detector · CPC title

• G01J2005/106

  Arrays · CPC title

• G01J5/10 Primary

  using electric radiation detectors · CPC title